Materials World Network: LIGA Ni-base superalloys for MEMS applications

材料世界网：用于 MEMS 应用的 LIGA 镍基高温合金

• 批准号: 75117822
• 负责人: Privatdozent Dr. Jarir Aktaa
• 金额: --
• 依托单位: Institut für Mikrostrukturtechnik (IMT)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2008
• 资助国家: 德国
• 起止时间: 2007-12-31 至 2011-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/75117822?language=en
• 关键词: Materials; World; Network; LIGA; Ni

The intellectual challenge addressed in this proposal involves the establishment of a sciencebased protocol for optimizing processing and heat treatment routes to produce a new class of MEMS materials (electrodeposited Ni-base superalloys) that will dramatically improve the functionality and expand the temperature capability of electrodeposited LIGA materials. A collaborative international research team is prepared to undertake this task. Overarching scientific issues to be addressed by this team include: (i) control and optimization of electrodeposition parameters to uniformly entrain Al nano-particles in ED Ni micro-components, (ii) development of heat treat schedules required to transform the as-deposited green composites into γ-γ’ superalloy microstructures, and (iii) characterization of the resultant microstructures and attendant mechanical properties. Close interaction of the research groups will allow for optimization of the process flow and result in the creation of novel high temperature LIGA ED Ni-base superalloys for MEMS applications. Close collaboration between the two institutions will be required to fulfill the scientific mission of the proposal, and integrated exchanges of graduate students and senior researcher scientists will create the vehicle for this collaboration and provide a unique educational experience for the students.

在这个建议中解决的智力挑战涉及建立一个基于科学的协议，用于优化加工和热处理路线，以生产一类新的MEMS材料（电沉积镍基高温合金），这将大大提高功能和扩大电沉积LIGA材料的温度能力。一个国际合作研究小组准备承担这项任务。该团队要解决的主要科学问题包括：（i）控制和优化电沉积参数，以均匀地将Al纳米颗粒夹带在艾德Ni微部件中，（ii）开发将沉积态绿色复合材料转化为γ-γ'高温合金微观结构所需的热处理计划，以及（iii）表征所得微观结构和伴随的机械性能。研究小组的密切互动将允许优化工艺流程，并导致创造新的高温LIGA艾德镍基高温合金的MEMS应用。两个机构之间的密切合作将需要履行该提案的科学使命，研究生和高级研究员科学家的综合交流将为这种合作创造工具，并为学生提供独特的教育体验。

项目成果

Development of Ni-based superalloys for microelectromechanical systems

• DOI: 10.1016/j.scriptamat.2012.06.003
• 发表时间: 2012-09-01
• 期刊: SCRIPTA MATERIALIA
• 影响因子: 6
• 作者: Burns, Devin E.;Zhang, Yong;Hemker, Kevin J.
• 通讯作者: Hemker, Kevin J.