Materials World Network: NSF-Germany (DFG) Materials Collaboration: LIGA Ni-base Superalloys for MEMS Applications

该项目建立了一个以科学为基础的方案，用于优化加工和热处理路线，以生产一种新型材料（电沉积镍基高温合金），这将大大提高电沉积LIGA材料的功能。来自约翰霍普金斯大学（JHU）和卡尔斯鲁厄理工学院（KIT）的一个国际研究小组合作完成了这项任务。该团队解决的主要科学问题包括：(i)电沉积参数的控制和优化，以均匀地在电沉积的Ni微组件中携带Al纳米颗粒；（ii）将沉积的绿色复合材料转变为所需的热处理计划的发展。×高温合金的显微组织，以及（iii）由此产生的显微组织和随之而来的力学性能的表征。研究小组的密切互动可以优化工艺流程，并为MEMS应用创造新的高温LIGA电沉积镍基高温合金。此次合作的技术动机源于扩大当前MEMS材料的温度能力的机会。迄今为止，大多数商用MEMS器件都是使用化学和气相沉积工艺制造的薄膜传感器。LIGA镍基高温合金的可用性将极大地扩展下一代MEMS器件的设计空间。镍基高温合金电沉积工艺流程的开发也将为电沉积修复策略奠定基础，这将为喷气推进和发电涡轮叶片的修复提供巨大的技术和经济优势。研究生和高级人才的国际交流促进了这种合作，并为所有参与者提供了独特的教育体验。此外，通过JHU的指导和KIT的外国访问，巴尔的摩市高中生的提议将大大扩大他们的学术和文化视野。

This project establishes a science-based protocol for optimizing processing and heat treatment routes to produce a new class of materials (electrodeposited Ni-base superalloys) that will dramatically improve the functionality of electrodeposited LIGA materials. An international research team from Johns Hopkins University (JHU) and the Karlsruhe Institute of Technology (KIT) collaborate on this task. Overarching scientific issues addressed by this team include: (i) control and optimization of electrodeposition parameters to uniformly entrain Al nano-particles in electrodeposited Ni micro-components, (ii) development of heat treat schedules required to transform the as-deposited green composites into ?×?{?ס¦ superalloy microstructures, and (iii) characterization of the resultant microstructures and attendant mechanical properties. Close interaction of the research groups allows for optimization of the process flow and result in the creation of novel high temperature LIGA electrodeposited Ni-base superalloys for MEMS applications.The technological motivation for this collaboration is derived from the opportunity to expand the temperature capability of current MEMS materials. To date, the majority of commercial MEMS devices have been thin film sensors manufactured using chemical and vapor deposition processes. The availability of LIGA Ni-base superalloys would greatly expand the design space for next generation MEMS devices. Development of a process flow for electrodeposition of Ni-base superalloys will also lay the foundation for electrodeposition repair strategies that would provide tremendous technological and economic advantage in the repair of turbine blades for both jet propulsion and power generation. International exchanges of graduate students and senior personnel fuel and enable this collaboration and provide a unique educational experience for all participants. Moreover, the proposed inclusion of Baltimore city high school students through mentoring at JHU and a foreign visit to KIT will greatly expand their academic and cultural horizons.