Materials World Network: NSF-Germany (DFG) Materials Collaboration: LIGA Ni-base Superalloys for MEMS Applications

该项目建立了一个以科学为基础的协议，用于优化加工和热处理路线，以生产一种新型材料(电沉积镍基高温合金)，这种材料将极大地提高电沉积LIGA材料的功能。约翰霍普金斯大学(JHU)和卡尔斯鲁厄理工学院(KIT)的一个国际研究小组合作完成了这项任务。该小组解决的主要科学问题包括：(I)控制和优化电沉积参数，以使纳米Al颗粒均匀地缠绕在电沉积的镍微部件中；(Ii)制定将沉积时的绿色复合材料转变为高温合金组织所需的热处理制度；以及(Iii)对所产生的组织和相应的机械性能进行表征。通过研究小组的密切合作，可以优化工艺流程，为MEMS应用创造新型高温LIGA电沉积镍基高温合金。这种合作的技术动机来自于扩大现有MEMS材料的温度能力的机会。到目前为止，大多数商用MEMS器件都是使用化学和气相沉积工艺制造的薄膜传感器。LiGa镍基高温合金的问世将极大地拓展下一代MEMS器件的设计空间。开发电沉积镍基高温合金的工艺流程也将为电沉积修复策略奠定基础，该策略将在修复喷气推进和发电的涡轮叶片方面提供巨大的技术和经济优势。研究生和高级人员的国际交流促进和促进了这种合作，并为所有参与者提供了独特的教育体验。此外，通过在JHU指导和对KIT的外国访问来纳入巴尔的摩市高中生的提议将极大地扩大他们的学术和文化视野。

This project establishes a science-based protocol for optimizing processing and heat treatment routes to produce a new class of materials (electrodeposited Ni-base superalloys) that will dramatically improve the functionality of electrodeposited LIGA materials. An international research team from Johns Hopkins University (JHU) and the Karlsruhe Institute of Technology (KIT) collaborate on this task. Overarching scientific issues addressed by this team include: (i) control and optimization of electrodeposition parameters to uniformly entrain Al nano-particles in electrodeposited Ni micro-components, (ii) development of heat treat schedules required to transform the as-deposited green composites into ?×?{?ס¦ superalloy microstructures, and (iii) characterization of the resultant microstructures and attendant mechanical properties. Close interaction of the research groups allows for optimization of the process flow and result in the creation of novel high temperature LIGA electrodeposited Ni-base superalloys for MEMS applications.The technological motivation for this collaboration is derived from the opportunity to expand the temperature capability of current MEMS materials. To date, the majority of commercial MEMS devices have been thin film sensors manufactured using chemical and vapor deposition processes. The availability of LIGA Ni-base superalloys would greatly expand the design space for next generation MEMS devices. Development of a process flow for electrodeposition of Ni-base superalloys will also lay the foundation for electrodeposition repair strategies that would provide tremendous technological and economic advantage in the repair of turbine blades for both jet propulsion and power generation. International exchanges of graduate students and senior personnel fuel and enable this collaboration and provide a unique educational experience for all participants. Moreover, the proposed inclusion of Baltimore city high school students through mentoring at JHU and a foreign visit to KIT will greatly expand their academic and cultural horizons.