Development of bio-mimetic sensor fusion system for detecting temperature and breath for rescue microrobots

A quartz crystal balance sensor for detecting carbon dioxide in breath was fabricated using anorganic amine compound film as a active material with carbon dioxide molecules. It was evaluatedwith a fabricated standard gas supplying system. The sensor was能够检测低碳dioxideconcentration gas of 0.04 to 4%作为一个很好的展示一个high signal resolution under these concentration region. a反应速度一个典型的pyroelectric thin film of PZT for an infrared sensor for the sensor was less than 5min.detecting temperature was fabricated by sputtering. In order to obtain a perovskite structure ofpzt,这是关于10℃/s for annealing at any ambient gas conditionssuch as oxygen， nitrogen or atmosphere was关键条件，independent of any deposition condition such as a substrate temperature. Effects of depositionconditions on a pyroelectric coefficient of the deposited PZT thin film was studied. Patterning ofdeposited PZT thin film was capable to perform by reactive ion etching in SF D26 D2 gas.An电子rochemical photoetching technique for fabricating shadow masks was developed for evaporationand sputtering of functional thin films. A micromachining technique for ceramic substrates forinfrared sensors was开发使用的photoetching process in a high temperature phosphoric acid. amicro flow sensor for detecting breath flow was fabricated with a structure of three platinum thin电影版本（20μm in width and 1mm in length） used as a heater and two thermal sensors。

A quartz crystal balance sensor for detecting carbon dioxide in breath was fabricated using an organic amine compound film as a reactive material with carbon dioxide molecules. It was evaluated with a fabricated standard gas supplying system. The sensor was capable to detect low carbon dioxide concentration gas of 0.04 to 4%, as well as showing a high signal resolution under these concentration region. A reaction speed of the sensor was less than 5min.A typical pyroelectric thin film of PZT for an infrared sensor for detecting temperature was fabricated by sputtering. In order to obtain a perovskite structure of PZT, it was found that temperature rise rate of over 10℃/s for annealing at any ambient gas conditions such as oxygen, nitrogen or atmosphere was key condition, independent of any deposition condition such as a substrate temperature. Effects of deposition conditions on a pyroelectric coefficient of the deposited PZT thin film was studied. Patterning of deposited PZT thin film was capable to perform by reactive ion etching in SFィイD26ィエD2 gas.An electrochemical photoetching technique for fabricating shadow masks was developed for evaporation and sputtering of functional thin films. A micromachining technique for ceramic substrates for infrared sensors was developed using photoetching process in a high temperature phosphoric acid. A micro flow sensor for detecting breath flow was fabricated with a structure of three platinum thin film cantilevers (20μm in width and 1mm in length) used as a heater and two thermal sensors.