Development of Micromachining Tool Driven by Radiation Pressure

光阱技术利用辐射压力对微观粒子进行控制和操纵，在生物学、微化学等领域有着广泛的应用。在这项研究中，我们提出，光阱技术也可以用于微加工。一些设计好的金刚石异形颗粒，既能被捕获力捕获，又能被光转矩旋转，可以作为微研磨或抛光的工具。所设计的异形粒子被用作由辐射压力驱动和控制的微加工工具。基于我们的数学模型开发了一个模拟器，可以定义主要由捕获力和光矩施加的任意形状粒子的运动。根据模拟结果设计了一种微加工工具，并利用光刻技术制作了该工具。主要研究结果如下：（1）提出了一种由翅片部分和刀具部分组成的刀具设计方案 ...更多信息 翅片部分在几何上设计用于控制辐射压力和有效旋转。由金刚石制成的工具部分具有用于微加工的锋利边缘。(2)在硅片表面光学捕获并驱动任意形状的金刚石磨粒。实验结果表明，捕获的磨粒可用于纳米级分辨率的微细加工。(3)我们证实了可控旋转的二氧化硅颗粒和金刚石磨粒捕获使用聚焦激光束与圆偏振实验。通过改变偏振态可以改变旋转速率。(4)已经预测了由捕获在空气中的二氧化硅制成的设计工具的运动行为，并且已经表明，当由激光束产生的扭矩被周围空气施加的阻力扭矩平衡时，可以实现3800 rpm的高转速。这为激光捕获石英或金刚石设计刀具用于纳米加工提供了一个很好的验证。(5)基于光刻技术和金刚石薄膜沉积，建立了金刚石设计工具的制造工艺。制作了两种尺寸的原型，并评估了它们的公差和功能。少

Optical trapping technology, which utilizes radiation pressure to control and manipulate microscopic particles, has been widely used in various fields, such as biology and microchemistry. In this study, we propose that optical trapping technology can also be used in micromachining. Some designed-shaped-particles made of diamond, which can not only be trapped by the trapping force but also rotated by the optical torque, might be used as tools for micro-grinding or polishing. The designed-shaped-particle is used as a micromachining tool driven and controlled by radiation pressure. A simulator has been developed based on our mathematical model and the motion of arbitrary shaped particles exerted primarily by trapping force and optical torque can be defined. A micromachining tool is designed based on simulation results and fabricated by using photolithography techniques. Main results of this study are summarized as follows(1) A designed-tool composed of a fin part and a tool part is propos … More ed. The fin part is geometrically designed for the control of radiation pressure and efficient rotation. The tool part made of diamond has a sharp edge for micromachining.(2) A diamond abrasive grain with arbitrary shape is optically trapped and driven on a silicon wafer surface. The experimental results show that the trapped abrasive grain can be used for micromachining with nanometer order resolution.(3) We confirmed controllable rotation of a silica particle and a diamond abrasive grain trapped using a focused laser beam with circular polarization experimentally. Rotation rate is changeable by changing polarization state.(4) The movement behavior of a designed-tool made of silica trapped in air has been predicted and it has been shown that high rotation speed of 3800 rpm can be achieved when the torque produced by the laser beam is balanced by the drag torque exerted by the surrounding air. This gives a good verification that designed-tool made of silica or diamond trapped by laser beam can be used in nanometer machining.(5) The fabrication process for a designed-tool made of diamond is established based on the photolithograph technique and the diamond thin film deposition. Two sizes of the prototyping are fabricated and evaluated their tolerances and functions. Less