Development of a Measuring Apparatus for Profile and dimension of Micro Parts

对于微细零件的检测和测量，需要对包括直线度、圆度和垂直度等几何偏差在内的轮廓和尺寸进行测量。因此，可以采用小型的带微探针的三维轮廓测量仪作为测量方法。本文详细介绍了一种新型的利用隧道效应的非接触式探头检测被测物体接近度的三维轮廓测量装置。然后通过粗糙度标准、微孔和沟槽等试验验证了该测量装置的有效性。当表面与探针之间的间隙小于1 nm时，可以观察到隧道效应。由于不需要复杂的仪器，而且可以在倾斜的地表上进行测量，因此本研究采用隧道效应来检测地表与地表的接触。试验装置由带线性编码器的X-Y-Z精密台、带旋转编码器的θ（旋转）台和一台通过GP-IB接口控制这些台的个人计算机组成。探头通过压电致动器安装在Z级上，因此必须精确控制。探头是这种测量方法中最重要的组成部分。本文还研究了适用于各种微细零件的微模压电火花加工测头的制作方法。

For the inspection and measurement of micro parts, measuring methods for the profile and dimension including geometrical deviations such as straightness, circularity and perpendicularity are needed. It is thought that a small three-dimensional profile measuring apparatus with microprobe can be utilized as the measuring method for this purpose. In this research a new three-dimensional profile measuring apparatus which has non-contact probe detecting proximity to measuring object through tunneling effect is described in detail. Then the validity of the measuring apparatus is shown through several specimens like roughness standard, micro hole and groove.Tunnel effect is observed when gap between surface and probe is less than 1 nm. In this research the tunnel effect is used to detect the contact of prove and surface, because no complicated devices are needed and measurement on the sloping surface is possible.The trial apparatus is composed of X-Y-Z precision stages with linear encoders, θ (rotating) stage with rotary encoder and a personal computer controlling these stages through GP-IB interface. The probe is mounted to Z stage through piezo electric actuators so that it must be precisely controlled.The probes are most important components of this measuring method. Fabrication method of probes suitable for measurement of each microparts by micro die-sinking electro discharge machining has also been developed.