A new method of position and attitude detection based on an angle sensor

本研究的目的是提出一种新的多自由度编码器系统，将二维角度传感器和二维角度网格相结合，在其上生成二维正弦角度方向图。首先，将最新研制的可检测局部倾斜的角度传感器与FAST刀具伺服形成的角度栅格相结合，研制出检测X、Y方向位置/位移的表面编码器系统样机。其次，提出了采用扫描激光束式角度传感器的改进型表面编码器和新的基于时间域内插的位置检测方法。通过使用这些方法，表面编码器系统除了能够检测X和Y方向的位置外，还具有检测俯仰、横摇和偏航的能力：因此，这种方法可以检测5自由度的运动。此外，扫描式角度传感器还具有减小角度栅格形状误差的优点。第三，提出了角度栅距的自标定方法，位置检测误差从15μm减小到1μm。第四，提出了采用多点光源的新型角度传感器，验证了该传感器对减小角度栅格形状误差的影响是有效的。最后，结合上述方法，研制了多点扫描式二维角传感器。针对角度网格，提出了一种利用二维FFT评定角度网格形状误差的新方法。作为表面编码器的应用，构造了由表面编码器输出信号控制的表面电机驱动的XYθz工作台，验证了表面编码器使工作台系统结构紧凑、简单的有效方法。

The objectives of this research is to propose a new multi-degrees-of-freedom encoder system by combining a 2-dimensional angle sensor and a 2-dimensional angle grid on which 2D sinusoidal angle patterns are generated. At first, we developed first prototype of surface encoder system to detect the X- and the Y- directional position/displacement with combining the newly developed angle sensor that could detect the local slope and the angle grid made with Fast tool servo. Second, modified surface encoder employing a scanning laser beam type angle sensor and new position detection method using interpolations of time domain are proposed. By using these, the surface encoder system has the ability of detecting pitch, roll and yaw in addition to the X- and the Y- directional positions : thus, it has been shown that 5DOF motions can be detected by this method. Furthermore, scanning type angle sensor has the merit of reducing the form error of the angle grid. Third, we propose the self-calibration method of the pitch of angle grid and have the result that position detection error can be reduced from 15 μm to 1 μm. Fourth, the new angle sensor that employ multi-spot light source was proposed and it was confirmed this sensor is effective to reduce the affection of form error of angle grid. At last, we combine the methods mentioned above and develop the multi-spot scanning type 2-dimensional angle sensor. With respect to the angle grid, a new method evaluating the form error of angle grid using 2-dimensional FFT has been developed. "Moreover, by applying this method, the form error induced by tool-shape has been reduced definitely. As an application of surface encoder, surface motor driven XYθz stage controlled by output signal of surface encoder was constructed and it is confirmed surface encoder is effective to make compact and simple the stage system.