Development of Manufacturing Technology of Micro Mechano-Electronic Devices by Laser Irradiation / AFM Probe Processing / Electrochemistry

1)注塑结构用铝模具的制作采用硬质阳极氧化、激光辐照、化学镀Ni-P工艺制备铝模具。利用所制得的铝合金模具，在自动化模具系统上成功地制得了20 cm长的塑料钉。在制备过程中，尝试仅在激光照射区域沉积几百微米厚的Ni-P层。结果表明，Ni-P的局部沉积是通过形成较厚的阳极氧化膜，然后封闭氧化膜的孔隙来实现的。2）激光辐照和电化学刻蚀技术制备微坑和微槽用YAG脉冲激光在NaCl溶液中开路或阳极极化时辐照阳极氧化膜覆盖的铝。开路条件下的激光辐照可产生锥形孔，而阳极极化条件下的激光辐照可产生半球形孔。微槽10 ...更多信息 通过形成阻挡阳极氧化膜、激光照射、在激光照射区域形成多孔阳极氧化膜以及阳极氧化膜的溶解，成功地制备了直径为50 μ m的纳米格罗夫斯。成功地在铝上形成了数百纳米宽的沟槽。4）激光辐照铝合金棒制备微细丝将直径为2 - 5 mm的铝合金棒阳极氧化成多孔阳极氧化膜，然后用脉冲YAG激光辐照Ni^<2+>溶液。在激光照射期间，铝棒以稳定的速率旋转并向上移动。激光照射后，将棒阴极极化以在激光照射区域存款Ni，然后浸入NaOH溶液中以溶解铝基底。可以成功地获得宽度为50 μ m的镍螺旋线。少

1) Fabrication of Aluminum Mold for Plastic Injection StructuringAluminum mold was fabricated by hard anodizing, laser irradiation, and Ni-P electroless plating. Using the aluminum mold produced, plastic pegs with 20 cm length was obtained with a automatic mold system successfully. In the fabrication procedure, several hundred micrometer thick Ni-P layer was attempted to be deposited only at the laser-irradiated area. It was found that the local deposition of Ni-P is accomplished by forming relatively thick anodic oxide films and then by sealing pores of the oxide films.2) Fabrication of micro pits and grooves by laser irradiation and electrochemical etchingAluminum covered with anodic oxide films was irradiated with a pulsed YAG-laser in NaCl solutions on open circuit or during anodic polarization. The laser irradiation on open circuit allowed the production of cone shaped pores, while the laser irradiation during anodic polarization produced hemispherical pores. Micro grooves with 10 … More to 50 micrometer diameter was fabricated successfully by formation of barrier anodic oxide films, laser irradiation, formation of porous anodic oxide films at the laser irradiated area, and dissolution of anodic oxide films.3) Fabrication of nano groves by AFM probe processingAluminum covered with thin anodic oxide films was scratched with AFM probes in solutions. The grooves with several hundred nanometer width were formed successfully on aluminum. The processing rate was found to depend strongly on the solution pH and chemical composition.4) Fabrication of micro wires by laser irradiation of the aluminum rodAluminum rods with 2 - 5mm diameter was anodized to form porous anodic oxide films and then irradiated with a pulsed YAG laser in Ni^<2+> solutions. During laser irradiation, the aluminum rod was rotated and moved upward at a steady rate. After laser irradiation, the rod was cathodically polarized to deposit Ni at the laser irradiated area, and then immesed in a NaOH solution to dissolve the aluminum substrate. A nickel spiral wire with 50 micrometer width could be obtained successfully. Less