Development of Indoor Environmental Improvement System by Using Nano Structural High Sensitivity Thin Film Gas Sensor

本研究的目的是将臭氧除臭与高灵敏度、高选择性的气体传感器相结合，开发室内环境改善系统。用原子力显微镜、X射线衍射仪、傅立叶变换红外光谱、X射线光电子能谱分析了薄膜的表面形貌、晶体结构、晶体取向、组成比和成键状态。实验结果表明，可以制备出化学计量晶态的SnO_2、WO_3、ZnO、TiO_2薄膜。采用新的PLD与直流相结合的方法，成功地制备了H_2敏感SnO_2-Pd薄膜和NOx敏感WO_3-Pd薄膜。溅起的血。为获得高效臭氧发生器，采用溅射方法在无声电放电型臭氧发生器电极表面制备了各种介质薄膜。阐明了臭氧产生量与放电电压和介质薄膜的关系，研制成功了高效臭氧发生器，并研制了高灵敏度气体传感器、氮气掺杂二氧化钛光催化剂和高效臭氧发生器相结合的室内环境改善系统，达到了本研究的目的。在未来，脉冲激光环境改善薄膜材料工艺的发展和臭氧环境改善系统的发展有望取得新的成果。从学术和产业的角度对这一问题进行积极的研究是非常重要的。这项研究的一部分已在国内外一家科学杂志和学术学会上发表，其余的研究计划在今年年底前逐一公布。

The purpose of this research is to combine the ozone deodorizations with the high sensitive and selective gas sensor and develop the indoor environmental improvement system.In this study, we prepared SnO_2, WO_3, ZnO, TiO_2 fims by pulsed Nd:YAG laser deposition (PLD) method. The surface morphology, crystalline structure, crystallographic orientation, composition ratio and bonding state of the films were analyzed by AFM, GXRD, FT-IR, XPS. Exprimental results suggest that the stoichimetric and crystalline SnO_2, WO_3, ZnO, TiO_2 flms can be prepared. We have succesfully deposited H_2 sensitive SnO_2-Pd thin films and NOx sensitive WO_3-Pd thin films using the new PLD In method combined with d.c. sputtering. Various dielectric thin films were prepared on the electrode surface of silent electrical discharge type ozonizer by sputtering method to get the highly effective ozonizer. The relation between the amount of the ozone generation and the discharge voltage and the dielectric thin film was clarified, and we succeeded in the development of highly effective ozonizer.In addition, the indoor environmental improvement system that combined a high sensitivity gas sensor, nitrogen dope TiO_2 photocatalyst, and highly effective ozonizer was developed.As mentioned above, the purpose of this research was achieved enough. In the future, an extremely new result is expected to be obtained by the development of the environmental improvement thin film material process using the pulsed laser and the development of the environmental improvement system using the ozonizer. It is very important to research the problem of this field aggressively from academic and an industrial viewpoint.A part of this research is published at a domestic and foreign science magazine and the academic society.The remainder of this research is scheduled to be made public one by one by the end of this year.