DEVELOPMENT OF MATHEMATICAL OPTIMIZATION IN NANO-MICRO ENGINEERING

在纳米微工程中，观察误差和执行误差对生产过程有很大影响。由于这种误差，传统的优化方法很难得到真正的最优解。在这项研究中，我们开发了几种优化算法来避免数值困难。所得结果对观测误差和实现误差具有较强的鲁棒性，在实际应用中具有较高的有效性。

In nano-micro engineering, observation and implementation errors strongly affects production process. With traditional optimization methods, it is difficult to obtain true optimum solutions due to such errors. In this study, we developed several optimization algorithms avoiding numerical difficulties. The obtained results are robust against observation and implementation errors, and are highly effective in practice.