Evaluation of Interfaces between Laminated Ferroic Materials, and Development of Multi-Functional Devices

研制了一种射频磁控溅射装置，该装置配备了分离共焦源和基片加热和离子照射系统，并用于使铁材料薄膜结晶。例如，使用该系统，即使在基片温度为353 K时，也能沉积出结晶的TiNi合金薄膜。适当的离子辐照有助于薄膜在较低的衬底温度下结晶。结晶的TiNi合金薄膜沉积在聚酰亚胺薄片上，被切割成双梁悬臂的形状，两梁的两端连接到电源。在室温下，悬臂通过0.1 Hz的电循环显示出可重复的双向运动。制备了一种由铁磁形状记忆合金和锆钛酸铅组成的多铁质层板，并观察了其磁电效应。该叠层装置具有良好的磁电灵敏度。因此，TiNi合金薄膜和压电聚合物的叠层器件也有望表现出良好的质量。

An RF magnetron sputtering apparatus equipped with separateconfocal sources as well as with a heating and ion-irradiating system for substrates wasdeveloped, and used to make the ferroic materials films crystalline. For example, thecrystallized TiNi alloy film is deposited even at 353 K of substrate temperature with usingthe system. Appropriate ion-irradiation is considered to be help to crystallize the film atlow substrate temperature. The crystallized TiNi alloy film deposited on a polyimide sheetwas cut into the shape of a double-beam cantilever and the ends of the two beams wereconnected to an electrical power supply. The cantilever shows a repeatable two-way motionby electrical cycle of 0.1 Hz at room temperature. A multiferroics laminate of ferromagneticshape memory alloy and lead zirconate titanate was also fabricated and observed itsmagnetoelectric effect. The laminated device was exhibited a good magnetoelectricsensitivity. Therefore, the laminated device which is a TiNi alloy film and a piezoelectricpolymer is also expected to be exhibited a good quality.