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Non contact measurement of Semiconductor Properties

Non contact measurement of Semiconductor Properties
半导体特性的非接触式测量
批准号:
10074644
负责人:
金额:
$6.33万
依托单位:
依托单位国家:
英国
项目类别:
Grant for R&D
财政年份:
2023
资助国家:
英国
项目状态:
已结题
起止时间:
2023 至 --

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中文摘要
翻译
英国要在已然成熟的硅片cmos行业取得领导地位,为时已晚。尝试这样做的成本高得令人望而却步。然而,许多总部位于英国的公司已经在化合物、有机和2D半导体领域取得了技术领先地位。这些领先者瞄准的是新兴的高增长和大容量应用。在接下来的几年里,这些公司将对英国的经济、社会、生产力、健康、环境和气候产生重大影响。我们认为,英国必须参与并鼓励--尤其是这些制造商--确保他们未来的大规模自动化制造将基地设在英国,提高他们的生产率和扩大生产。硅谷的经验表明,成功的一个因素是创新的中小企业为大量制造商开发新工具、材料、工艺和计量的本地“生态系统”。我们公司就是这些供应商之一,我们相信“变革性技术竞赛”是一个很好的工具,可以在需要的地方和正确的时间提供所需的支持。SemiMetrics有限公司需要资金来进行可行性研究,以验证一种创新的新计量方法的表现,并确定其全球市场潜力。新的计量产品将为总部设在英国和海外的新型先进半导体制造商提供显著的好处,目标是新的高增长、大批量应用。SemiMetrics Ltd将与其中10家总部位于英国的战略制造商合作,确定新的计量理念对每一种应用的适用性,并确定新的计量概念在提高产量和降低成本方面的影响和价值。这是我们通过提高生产率和竞争力来扩大制造业的贡献。SemiMetrics Ltd还将根据这项位于英国的研究结果,计算新计量设备的可用世界市场,并保护其知识产权。新的计量技术无需进行任何物理接触,即可实时确定半导体的关键电学特性。这意味着制造商可以在线测试实际的半导体产品,而不是“时不时地”测试样品。在生产过程中对半导体薄膜进行监控,可以实现更好的统计过程控制,指导工艺的持续改进和更快的优化。这将反过来为半导体制造商节省成本和提高产品质量。减少材料浪费直接影响制造的可持续性,并减少批量制造对环境的影响。
英文摘要
It is too late for the UK to achieve leadership in the already mature silicon CMOS industry. The costs to attempt this are prohibitive. However, many UK based companies have already achieved technical leadership in compound, organic and 2D semiconductors. These leaders are targeting emerging high-growth and high-volume applications. In the next years these companies will have a major impact on the UK economy, society, productivity, health, environment, and climate. We believe the UK must engage and encourage _specifically these manufacturers_ to ensure they base their future high-volume automated manufacturing in the UK, improve their productivity and scale-up production.The Silicon Valley experience shows one factor to success is a local "ecosystem" of innovative SME's developing new tools, materials, processes, and metrology for the high-volume manufacturers. Our company is one of those suppliers and we believe that the "Transformative Technologies Competition" is an excellent instrument to deliver the required support exactly where it is needed and at the right time.SemiMetrics Ltd needs funding to undertake a feasibility study to verify the performance of an innovative new metrology method and to determine its worldwide market potential. The new metrology product would offer significant benefits to manufacturers of new advanced semiconductors based in the UK and abroad, targeting new high-growth, high-volume applications.Working with ten of these strategic UK based manufacturers SemiMetrics Ltd will determine the applicability of the new metrology idea to each of these applications and determine the impact and value of the new metrology concept on yield improvement and lowering costs. This is our contribution scale-up in manufacturing by increasing productivity and thus competitiveness. SemiMetrics Ltd will also, from the results of this UK based study, be able to calculate the available world market for the new metrology equipment and protect its IP.The new metrology determines, in real-time, the key electrical properties of a semiconductor without making any physical contact. This means that the manufacturer can test the actual semiconductor product in-line rather than testing samples from "time to time". Monitoring of the semiconductor films during production enables better statistical process control guiding continuous improvement and faster optimization of the process. This will in turn result in cost savings and improved product quality for the semiconductor manufacturers. Reduced material waste directly impacts manufacturing sustainability and reduces the impact of volume manufacturing on the environment.
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