GRAPHene device Scale Up of Manufacturing (GRAPH SUM)
GRAPHene device Scale Up of Manufacturing (GRAPH SUM)
批准号:
10075950
负责人:
金额:
$11.42万
依托单位:
依托单位国家:
英国
项目类别:
Collaborative R&D
财政年份:
2023
资助国家:
英国
项目状态:
已结题
起止时间:
2023 至 --
中文摘要
Paragraf是世界上第一家使用标准半导体工艺生产石墨烯电子设备的公司。自2017年从剑桥大学分拆出来以来,我们发展迅速,并于2019年开发和销售了第一款基于石墨烯的霍尔效应传感器(GHS)设备。从那时起,我们的样品产品产生了很大的兴趣,特别是在汽车市场上,以其他技术无法实现的灵敏度和精度进行位置和电流传感。客户的反馈非常积极,我们预计对产品的需求将迅速增加。为了满足这一需求,我们需要迅速扩大GHS设备的生产规模。我们最近在英国开设了第二个生产基地,以支持这一规模的扩大。然而,提高产量的一个关键要求是将我们目前的生产晶圆尺寸从2英寸移动到6英寸。这将使我们能够满足基于客户兴趣的预测需求,不仅是我们目前的GHS产品,还有目前处于研发阶段的生物传感和固态电子产品。因此,该项目的目的是对工艺的每个阶段(石墨烯生长、器件制造、器件组装和测试)进行6英寸生产的可行性试验。对于石墨烯的生长,可以使用Paragraf现有的MOCVD工具来完成。使用标准半导体工艺制造6英寸规模的石墨烯器件是以前从未做过的,这将是Paragraf公司发展的一个里程碑,也是英国半导体制造业的一项重大成就。
英文摘要
Paragraf is the first company in the world to produce graphene-based electronic devices using standard semiconductor processes. We have grown rapidly since spinning out from Cambridge University in 2017, developing and selling our first graphene based Hall-effect sensor (GHS) devices in 2019\. Since then, our sample products that have generated a great deal of interest, particularly in the automotive market for positional and current sensing at a sensitivity and accuracy not possible with other technologies.The feedback from customers has been extremely positive and we expect demand for products to increase rapidly. In order to meet this demand we need to rapidly scale-up our GHS device manufacture. We have recently opened a second manufacturing site in the UK to support this scale up. However a key requirement to increase throughput is to move from our current production wafer size of 2" to 6". This will enable us to meet the forecast demand based on customer interest not only on our current GHS product but also further products in biosensing and solid state electronics currently at the R&D stage.The aim of this project therefore is to run a feasibility trial on production at 6" for each stage of the process: graphene growth, device fabrication and device assembly and test. For graphene growth this can be done using the existing MOCVD tools at Paragraf.Graphene device fabrication at 6" scale using standard semiconductor processing has never been done before and would represent a milestone in Paragraf's growth as a company and a significant achievement for UK semiconductor manufacturing.
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