University of Surrey Ion Beam Centre

这项提议是为了支持成功的国家离子束中心的发展、培训和核心组成部分。未来四年的创新包括：扩展DanFysik注入机，以提供低能量能力(低至200 eV)；更换2 MV注入机上的束线，以提供8英寸晶片能力；增加可验证的低剂量能力，用于离子束诱导损伤研究。目前正在从其他来源筹集资金，以建造水平和垂直纳米束，以扩大离子束分析能力，并利用生物医学界面的研究。这些发展的另一个优势将是使IBC能够将其研究基础从微电子材料扩展到新的领域，包括文化遗产、生物医学应用、纳米技术以及地质学和宇宙学。我们预计IBC将在4年内获得资金：三分之一来自工业；三分之一来自其他资助机构；三分之一来自EPSRC。这将大大减少EPSRC要求的资金数额。IBC内的效率收益将使我们在新的授权期内将门票价格从目前的240降至180。

This proposal is to support the development, training and core componants of the successful national Ion Beam Centre. Innovations over the next four years include: extending the DanFysik Implanter to give a low energy capability (down to 200 eV); replacing the beam line on the 2MV implanter to give an 8 inch wafer capability; add a verifiable low dose capability for ion beam induced damage studies. Funding is being sort from other sources to also build a horizontal and vertical nanobeam to expand both ion beam analysis capabilities and exploit research at the biomedical interface.An added advantage of these developments will be to place the IBC in a position that it will be able to expand its research base from micro electronic materials into new areas including cultural heritage, biomedical applications, nanotechnology and geology and cosmology. In 4 years time we expect the IBC to be funded: One third from industry; one third from other funding bodies; one third from EPSRC. This will significantly reduce the amount of funding requested from EPSRC.Efficiency gains within the IBC will allow us to reduce the ticket price from 240 currently to 180 for this new grant period.