A probe station compatible with a laser-vibrometer for advanced MEMS dynamic testing

微机电系统（MEMS）的发展对交通运输、电信、多媒体、医疗卫生等领域的技术进步具有重要的推动作用。MEMS注定会成为众多应用创新的关键驱动技术，对从汽车到生物医学工程的广泛行业产生巨大影响。原型表征和验证在MEMS技术发展中至关重要。MEMS器件的仿真和设计优化不足，并且由于缩放问题、不同制造工艺的独特特性和系统环境没有得到充分的测试，可能会产生无效的结果。为了获得准确的性能信息，对器件进行实验测试是最优的方法。对于MEMS测试，微尺度元件的可及性和噪声的消除是两个必不可少的因素。申请人的研究目标是开发用于生物医学应用的微组装和微操作的MEMS器件。作为研究的关键部分，需要进行大量的实验测试。本资助申请的经费将用于购买两个设备：一个探测站和一个防震台，以支持申请人的研究。成功的实验结果将支持和增强新型MEMS器件的分析建模和设计，从而导致研究的成功。这将为生物医学MEMS器件的模块化和商业化铺平道路，从而大大推进加拿大的这一领域。所要求的设备将补充cfi授予的激光振动仪。为了增加CFI和NSERC投资的影响，申请人正在与CMC微系统公司讨论CMC在加拿大范围内使用女王设备的可能性。这样的安排将使加拿大各地的MEMS研究人员受益于这种能力，并增加在MEMS测试领域培养高素质人才的机会。

Recent development of Micro-Electro-Mechanical Systems (MEMS) has the potential to significantly boost the technological progress in such fields as transportation, telecom, multimedia, medicine and health care, etc. MEMS is destined to be a key driver technology for innovations in numerous applications with dramatic impact on a wide spectrum of industry, from automotive to biomedical engineering.    Prototype characterization and validation is of paramount importance in MEMS technology development. Simulation and design optimization of MEMS devices is insufficient and can produce invalid results as scaling issues, the unique characteristics of varying fabrication processes and the systems environment are not fully tested.  To obtain accurate performance information experimental testing of a device is the optimal approach. For MEMS testing, accessibility to micro scale components and the elimination of noise are the two essential factors. The applicant's research is targeted to develop MEMS devices for microasssembly and micromanipulations for biomedical applications.  Intensive experimental testing is required as a key part of the research.  The funding requested in this grant application will be used to purchase two pieces of equipment: a probe station and an anti-vibration table to support the applicant's research.  Successful experimental results will support and enhance the analytical modeling and design of novel MEMS devices, and consequently lead to the success of the research. This will pave the way to modularization and commercialization of biomedical MEMS devices and thus significantly advance the field in Canada.    The requested equipment will complement a CFI-awarded laser vibrometer. Seeking to increase the impact of CFI and NSERC investments, the applicant is in discussion with CMC Microsystems exploring the possibility of CMC enabling Canada-wide access to this Queen's-based equipment.  Such an arrangement would allow MEMS researchers across Canada to gain benefit from this capability and increase the opportunities for developing highly-qualified personnel in the area of MEMS test.