Nonlinear control of electrostatic MEMS with applications to optical systems

该计划将先进的非线性控制技术应用于微机电系统（MEMS）领域，以便为MEMS应用提供增强的功能和性能。在本计划中提出的许多问题尚未在MEMS文献中得到解决，并且没有琐碎的解决方案来解决这些问题。另一方面，MEMS表现出丰富而复杂的特性，从控制技术的角度提供了具有挑战性和吸引力的主题。因此，所提出的研究不仅将彻底改变MEMS在未来应用中的作用，而且还将导致新类型的一般非线性控制问题。这个项目的成功将有助于填补这两个领域之间的空白。本课程旨在为MEMS控制系统的分析和设计建立坚实的理论基础，同时考虑到实际系统的实际运行条件。将特别注意允许避免与不可控性相关的奇点的算法以及能够保证切换系统稳定性的算法。微器件的不同物理特性和约束条件也将被纳入MEMS控制系统的设计中。将开发具有新传感机制的控制方案，使MEMS成本更低，更容易实施，更可靠。然后，研究工作将集中在利用空间分布式系统的分散控制技术控制互连MEMS阵列。将使用CoventorWare和COMSOL对MEMS器件进行仿真，并构建包含COMSOL和MATLAB的交互式仿真环境。硬件在环仿真和实时实验实现也将用于控制系统的验证和验证。该项目的最终目标是为增强自适应光学（AO）系统建立眼像差诊断和校正系统的关键组件的实验演示。由于一个完整的AO系统及其各个子系统的复杂性和复杂性，所提出的研究将是向前迈出的重要一步，使我们在该领域处于领先地位。

This program will apply advanced nonlinear control techniques to the area of microelectromechanical systems (MEMS) in order to provide enhanced functionality and performance for MEMS applications. Many issues raised in the present program have not yet been addressed in MEMS literature, and there are no trivial solutions to these problems. On the other hand, MEMS exhibit rich and complex properties, providing challenging and attractive subjects from the perspective of control techniques. Hence, the proposed research will not only revolutionize the roles MEMS will play in future applications, but also lead to new classes of generic nonlinear control problems. The achievement of this program will then help fill the gap between these two areas.    This program aims firstly at building a solid theoretical basis for MEMS control system analysis and design while taking into account the realistic operational conditions for real-life systems. A particular attention will be paid to algorithms allowing avoiding the singularity related to the uncontrollability and to those being able to guarantee the stability of switched systems. Diverse physical properties and constraints of micro-devices will also be incorporate into MEMS control system design. Control schemes with new sensing mechanisms will be developed to make MEMS less costly, much easier to implement, and more reliable. The research work will then focus on the control of interconnected MEMS array using techniques of decentralized control of spatially distributed systems. CoventorWare and COMSOL will be used to simulate MEMS devices and an interactive simulation environment containing COMSOL and MATLAB will be built. Hardware-in-the-loop simulations and real-time experimental implementations will also be used for control system verification and validation.    The ultimate goal of this program is to build experimental demonstration of key components of an eye aberration diagnostic and correction system for enhanced adaptive optics (AO) systems. Due to the complexity and sophistication of a complete AO system and its various subsystems, the proposed research will represent a significant step forward putting us in a leading position in this area.