Integration of micro-sensors with MEMS devices for microassembly and micromanipulation

微电子机械系统（MEMS）的发展使其在交通、医疗、保健等领域的应用成为可能。MEMS补充并在某些情况下改进了传统器件。近年来，一个特别重要的领域是所谓的“生物MEMS”领域;它将MEMS技术与生物医学平台相结合。生物MEMS领域的最新挑战来自于对生物操纵和微组装的需求。特别是，反馈传感器为基础的操纵是必要的，以实现有效和可靠的处理微对象在不同的环境。本研究探讨了具有嵌入式电容梳状驱动传感器的MEMS器件的开发，目的是促进微组装、微操作和生物医学应用。在本研究中，我们将开发出具有可重构能力的新型微电容梳状驱动传感器。所提出的传感器将重新配置新的主动（供电）/被动闭锁机制。通过重构，使其具有现有传感器所不具备的高灵敏度、大测量范围和良好的线性度。新型的可重构静电线性梳状驱动器将被开发，这将降低传统的同行所需的高驱动电压，从而使之有可能在未来的低电压CMOS（互补金属氧化物半导体）电路集成改进的梳状驱动器。 作为一个组成部分，原始的MEMS机制，如，微探针，微组织/细胞显微操作器将被开发和集成的建议传感器与这些设备将被研究。该项目积累了集成MEMS传感器与其他单片制造的MEMS器件的经验。所得结果对今后MEMS和CMOS集成信号调理电路的研究具有一定的参考价值。 在该项目的最后阶段，拟议的设备将被纳入实际应用。该项目的成功将为MEMS集成化、模块化和商业化铺平道路，并显著推动加拿大的该领域发展。

Recent development of Micro-Electro-Mechanical Systems (MEMS) has made it possible to integrate them in such fields as transportation, medicine and health care. MEMS complement and in some cases improve traditional devices. One particular area that has been steadily gaining significance in recent years is the field of so-called "Bio-MEMS"; it integrates MEMS technology with biomedical platforms. Recent challenges in the Bio-MEMS area stem from a need for biomanipulation and microassembly. In particular, feed-back sensor-based manipulations are necessary to realize efficient and reliable handling of micro-objects in different environments. This study investigates the development of MEMS devices with embedded capacitive comb-drive sensors with the objective of facilitating microassembly, micromanipulation and biomedical applications. In the proposed research novel micro capacitive comb-drive sensors with capability to reconfigure will be developed. The proposed sensors will be reconfigured by novel active (powered)/passive latching mechanisms. Through reconfiguration, such sensors will gain high sensitivity, large measurement range and good linearity (which existing ones lack). New reconfigurable electrostatic linear comb-drive actuators will be developed which will reduce the high drive voltage required by traditional counterparts and consequently make it possible to integrate improved comb-drive actuators with low voltage CMOS (Complementary Metal Oxide Semiconductor) circuits in the future.  As an integral part, original MEMS mechanisms, such as, microprobes, micro tissue/cell micromanipulators will be developed and integration of the proposed sensors with these devices will be studied. This project accumulates experience on integrated MEMS sensors with other monolithically fabricated MEMS devices. The results obtained will be valuable for the future research on integrated MEMS and CMOS signal conditioning circuits.  In the last stage of the project, the proposed devices will be incorporated into practical applications. The success of the project will pave the way to MEMS integration, modularization and commercialization and significantly advance the field in Canada.