Dimension and Surface Characterization of Precision Micromachined 3D Components with Micro/Nano-Scale Features

在包括生物医学、电子和航空航天应用在内的广泛领域中，产品的小型化极大地增加了在包括不锈钢、钛、陶瓷、聚合物等在内的各种材料中制造具有小于一微米的特征的复杂3D部件的需求。先进多尺度制造实验室（LAMM）的研究计划侧重于了解，建模和开发微加工工艺和系统，特别适用于在微米/纳米尺度上对具有各种几何形状和特征的3D部件进行精密加工。为了提高新兴小型化产品的性能，具有成本效益的批量生产和小零件的精度对产品在市场上的成功起着关键作用。正确理解和建模的微加工过程中需要达到最佳的工艺条件，更好的精度和表面质量。开发和优化有效的工艺计划和工艺控制系统以及适用于各种工程材料的可加工性数据库对于给定零件的成本效益和自动化批量生产也至关重要。目前，研究计划集中在机械微铣削和飞秒激光加工工艺。

Miniaturization of products in a wide range of sectors including biomedical, electronics, and aerospace applications have dramatically increased the need to fabricate complex 3D parts with features smaller than a micron to a high relative accuracy in a diverse set of materials including stainless steel, titanium, ceramics, polymers, etc. The research program at the Laboratory of Advanced Multiscale Manufacturing (LAMM) focuses on understanding, modeling, and developing micromachining processes and systems particularly suitable for precision machining of 3D components with a variety of geometries and features at the micro/nano-scale. For improved performance of emerging miniaturized products, cost-effective batch production and accuracy of small parts plays a critical role in success of the product in the market. Proper understanding and modeling of the micromachining processes are required to achieve the optimum process conditions for better accuracy and surface quality. Development and optimization of effective process plans and process control systems as well as a machinability database for a wide range of engineering materials are also critical for cost-effective and automated batch production of a given part. Currently, the research program concentrates on mechanical micro-milling and femtosecond laser machining processes.