Advanced nanostructure and device fabrication

纳米科学技术是近年来发展最快的研究领域之一。纳米制造技术是这种快速增长的基石；如果没有这种能力，纳米技术将仅仅是一种推测。事实上，虽然纳米科学/技术的诞生是在50多年前，从理查德·费曼1959年著名的演讲“底部有足够的空间”开始，但在最初的30年里，这一领域的发展相当缓慢——主要是由于缺乏纳米制造能力（及其可及性）。只是从20世纪90年代中期开始，纳米研究才经历了爆炸式的增长，与此同时，各种纳米制造技术的发展和更多的可用性也得到了提高。十年后，纳米技术行业经历了类似的快速增长。

Nanoscale science and technology is one of the fastest growing research areas in recent years. Nanofabrication techniques are the cornerstone for this rapid growth; without this capability, nanotechnology would be a mere speculation. In fact, while the birth of nano-science/technology was occurred over fifty years ago, from Richard Feynman’s famous 1959 lecture “There's Plenty of Room at the Bottom”, growth in this field was rather slow in its first 30 years - mainly due to the lack of nanofabrication capability (and its accessibility). It is only since the mid-1990s that nano-research has experienced explosive grown, coinciding with the development and more availability of a broad range of nanofabrication techniques. The nanotechnology industry has experienced a similar fast growth since a decade later.