Development of Ultra Low-Noise Wideband Accelerometers

在过去的四年中，SFU的研究人员开发了具有前所未有的性能指标组合的微机械加速度计，包括亚µg分辨率，高达10kHz的带宽和优于120dB的动态范围。这些设备是与我们的工业合作伙伴Ultra Electronics Maritime systems合作开发的，用于取代声纳系统中的水听器。最初工作的目标是在三年内交付满足预期性能水平的原型机，这些原型机可以完全在加拿大制造，因为预期应用于国防市场。在此过程中，我们开发了新颖的设备设计，新的微制造工艺，合适的封装工艺，低噪声接口电子设备和封装内压力监测解决方案。我们进一步开发了噪声测量技术和制造器件的全面表征。2016年夏天，作为原始研究项目的最后阶段，我们将我们的封装设备运往UEMS。

Over the past four years, researchers from SFU have developed micromachined accelerometers with an unprecedented combination of performance metrics, including sub-µg resolution, bandwidths of up to 10kHz, and dynamic ranges of better than 120dB. These devices were developed to replace hydrophones in sonar systems in collaboration with our industrial partner, Ultra Electronics Maritime Systems. The goal of the initial work was to deliver prototypes that met the desired performance levels within three years that could be entirely manufactured in Canada as the intended application was in defense market. Over the course of this effort, we developed novel device designs, new microfabrication processes, a suitable packaging process, low-noise interface electronics, and in-package pressure monitoring solutions. We further developed techniques for measurement of noise and full characterization of the fabricated devices. In summer 2016, we shipped our packaged devices to UEMS as the last phase of original research project.