High Sensitivity MEMS based Resonant Gyroscopes

基于MEMS(微电子机械系统)的谐振式惯性传感元件，如陀螺仪，广泛应用于消费、工业、汽车和生物医学等领域。谐振器是一种振动质量，在振动陀螺仪中充当传感元件。在器件运行过程中，谐振器需要处于非振荡状态。由于衰减(内部/外部)造成的能量损失会降低谐振器的振荡，从而降低性能。因此，振动过程中的最小阻尼对于获得更高的灵敏度是至关重要的。不同类型的能量损失影响减振效果，包括锚固损失、挤压油膜效应和热弹性减振(TED)。特别是，目前的问题涉及减少AMP的设计考虑因素，特别是TED。量化谐振器衰减的一个性能参数称为品质因数(Q)，它提供了谐振器在振荡过程中保持能量的效率的衡量标准。用于高性能运动传感应用的惯性传感器要求通过最小化能量损失来最大化其Q值。因此，对Q损失机制的确切理解是使Q最大化(达到100万)的关键。最近，Nxtsens微系统公司已经开发出Q在100k量级的原型。Nxtsens现在的目标是高灵敏度设备，高性能共振陀螺仪需要Q达到100万。为了设计这样的器件，必须对其设计中不同的损耗机理进行分析和优化。这个NSERC Engage项目将是Nxtsens和Dr之间的第一次合作努力。温莎大学的贾拉勒·艾哈迈德将开发优化方法，系统地为高Q谐振式陀螺仪提供改进的几何结构。该方法将为Nxtsens提供宝贵的知识和反馈，显示一条修改其设计以达到高端应用的途径。它还将通过展示影响谐振陀螺仪性能的设计和材料参数之间的关系，为学术界和工业界提供更多的科学见解。为基于MEMS的高精度谐振式陀螺仪的进一步发展奠定了基础。

MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes arewidely used in many consumer, industrial, automotive and biomedical applications. A resonator is anoscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be inoscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator'soscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving highersensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, andThermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reducedamping, and specifically, TED. One performance parameter that quantifies resonators damping is calledQuality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy duringoscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q byminimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Q(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k.Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performanceresonant gyroscopes. In order to design such devices different loss mechanisms on their design have to beanalyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens andDr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematicallyprovide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens withvaluable knowledge and feedback showing a path to modify their design to reach high end applications. Itwould also provide greater scientific insights to the academic and industry community by showing relationshipsbetween design and material parameters that effect performance in resonant gyroscopes. It would facilitatefurther development of MEMS based high precision resonant gyroscopes.