Design of high precision MEMS gyroscope compatible with wafer level packaging process (Micralyne "MicraSilQ")

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A gyroscope is a sensor that can measure the rate of rotation of an object. MEMS (Microelectromechanical**Systems) based gyroscopes are miniature sensors that are fabricated using semiconductor based**microfabrication. MEMS gyroscopes offer a wide range of advantages, including smaller size, lighter weight,**lower cost, and lower excitation power. MEMS gyroscopes use a small oscillating mass as the core sensing**element that responses to angular motion. The oscillating mass needs to be vibrating under vacuum to**maximize its sensitivity and minimize drift. The vacuum isolation is necessary to: (i) minimize vibration**energy loss due to air damping and (ii) maintain integrity of the fragile mechanical component from dust or**contamination. Various vacuum packaging methods are available including sealing individual chip by chip**basis and wafer-level sealing. Individual device per device vacuum packaging is costly and fails to provide**mass manufacturing therefore wafer-scale packaging is preferred. Recently, Micralyne developed a wafer-scale**vacuum packaging method (MicraSilQTM) platform that offers an all-in-one solution integrating wafer-level**fabrication and hermetic vacuum packaging. It is a proven, cost-effective solution for applications requiring**high accuracy, low-noise mechanical sensing for acceleration and shock measurements. Using this process,**Micralyne showed high performance accelerometers. However, this platform is also ideal for MEMS**gyroscopes. Micralyne is interested to develop a gyroscope design compatible with MicraSilQ. Currently, there**is no MEMS gyroscope design approach available that can be suitable with MicraSilQ for high precision**gyroscopes. This Engage grant will develop a MEMS gyroscope design for MicraSilQ platform by using**analytical and numerical modelling techniques. There is a huge demand for high precision MEMS gyroscopes**in aerospace, consumer electronics, biomedical, defense, and autonomous applications. This NSERC Engage**will be the first collaborative effort between Micralyne Inc. and Dr. Jalal Ahamed of University of Windsor to**develop MEMS gyroscopes compatible with the wafer-scale vacuum packaged MicraSilQ platform.