Finite element analysis for design optimization of microelectromechanical based 3D gyroscopes

基于微机电的 3D 陀螺仪设计优化的有限元分析

• 批准号: 501111-2016
• 负责人: Ahamed, Mohammed
• 金额: $ 1.82万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2016
• 资助国家: 加拿大
• 起止时间: 2016-01-01 至 2017-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=608475
• 关键词: Finite; element; analysis; design; optimization

Microelectromechanical Systems (MEMS) based gyroscope sales are exponential growing with the booming needs from the consumer electronics in sensing motion. A technology once regarded exclusively for navigation applications, is now actively pursued in consumer electronics, thanks to the cost effective semiconductor fabrication technology. MEMS gyroscope employs a resonating mass (resonator) to detect changes in motion. The resonator is the central element of the gyroscope. Energy loss of the MEMS resonator is the primary barrier towards the achieving navigation grade precision. Predicting the resonators vibration characteristics

随着消费电子产品对运动传感的需求不断增长，基于微机电系统 (MEMS) 的陀螺仪销量呈指数级增长。由于具有成本效益的半导体制造技术，曾经被认为专门用于导航应用的技术现在在消费电子产品中得到了积极的应用。 MEMS 陀螺仪采用谐振质量（谐振器）来检测运动变化。谐振器是陀螺仪的核心元件。 MEMS 谐振器的能量损失是实现导航级精度的主要障碍。预测谐振器的振动特性