Finite element analysis for design optimization of microelectromechanical based 3D gyroscopes

基于微机电系统(MEMS)的陀螺仪销量呈指数级增长，随着消费电子产品对运动传感的需求日益增长。由于具有成本效益的半导体制造技术，一项曾经被认为仅用于导航应用的技术现在正在消费电子产品中积极追逐。MEMS陀螺仪使用共振质量(谐振器)来检测运动变化。谐振器是陀螺仪的核心部件。MEMS谐振器的能量损耗是实现航级精度的主要障碍。预测谐振器的振动特性

Microelectromechanical Systems (MEMS) based gyroscope sales are exponential growing with the booming needs from the consumer electronics in sensing motion. A technology once regarded exclusively for navigation applications, is now actively pursued in consumer electronics, thanks to the cost effective semiconductor fabrication technology. MEMS gyroscope employs a resonating mass (resonator) to detect changes in motion. The resonator is the central element of the gyroscope. Energy loss of the MEMS resonator is the primary barrier towards the achieving navigation grade precision. Predicting the resonators vibration characteristics