A new class of MEMS gyroscopes based on nonlinear coupling and internal resonance

微陀螺仪是继压力传感器和加速度计成功商业化之后MEMS（微机电系统）技术的下一个主要传感应用。最商业化使用的MEMS陀螺仪采用振动质量块来通过结构的振动模式的耦合来检测角速率。然而，它们经常受到有限分辨率和长期漂移的影响。这部分是由于这些设备产生的小信号和制造的非理想性。在本计画中，我们利用非线性耦合与内共振来开发新一代的振动式微机电陀螺仪。使用这个想法，我们已经达到了一个宏观T梁设计的概念证明，具有上级感测模式性能超过其线性对应物，具有显着更高的信噪比和增强的灵敏度。我们的T型梁微设计也展示了类似的结果-但也表现出不利的行为，源于不必要的非线性，由于静电力和微观结构耦合，没有观察到在宏观系统。我们计划通过更好的模型和设计来应对这些挑战。我们还建议使用先进的设计，采用相同的工作原理，并提供非线性，散装模式陀螺仪。采用体模谐振器可以提高陀螺的灵敏度，抑制噪声。我们面临的另一个挑战是开发合适的电子器件来正确驱动这些非线性器件。我们还计划使用某些非线性的主动反馈来加强驱动和感测模式之间的相互作用，并取消“坏”的非线性。这项研究的成果将是廉价陀螺仪（用于手机，数字媒体和游戏以及可穿戴设备等应用）开发的重大突破，并将把一个新颖的想法转变为一项颠覆性技术。该提案福尔斯最符合NSERC的先进制造和人类与数字媒体互动的战略目标领域。通过与具有成功商业化记录的工业合作伙伴合作，我们确定了大规模生产和商业化的研究和技术路线图。

Micro-gyroscopes are the next major sensory application of the MEMS (Micro Electro Mechanical System) technology after the successful commercialization of pressure sensors and accelerometers. The most commercially used MEMS gyros employ a vibrating mass to detect angular rate through coupling of vibration modes of a structure. However, they often suffer from limited resolution and long-term drift. This is partly due to the small signals produced by these devices and manufacturing non-idealities. In this proposal we utilize nonlinear coupling and internal resonance to develop a new generation of vibratory MEMS gyroscopes. Using this idea, we have arrived at a macro T-beam design proof of concept that has a superior sense mode performance over its linear counterparts with significantly higher signal to noise ratio and enhanced sensitivity. Our T-beam micro designs have also demonstrated similar results - but also exhibit adverse behavior stemming from unwanted nonlinearities due to the electrostatic forces and the micro structural couplings, not observed in the macro-system. We plan to address these challenges through better models and designs. We are also proposing to use advanced designs to employ the same operating principles and deliver nonlinear, bulk-mode gyroscopes. By using bulk mode resonators, we will enhance the sensitivity of the gyroscope and suppress the noise. Another challenge that we faced was the development of suitable electronics to drive these nonlinear devices properly. We also plan to use active feedback of certain nonlinearities to strengthen the interaction between drive and sense modes and to cancel the "bad" nonlinearities. The outcome of this research will be a major breakthrough in the development of inexpensive gyros (for applications such as: cellphones, digital media and games, and wearable devices), and will transform a novel idea into a disruptive technology. The proposal falls best within NSERC Strategic target areas of Advanced Manufacturing and Human Interaction with Digital Media. Through working with an industrial partner with a successful commercialization track record, we define a research and technology roadmap for the large-scale production and commercialization.****