Urgent Upgrade of Atomic Layer Deposition with Plasma Capability to Accelerate Energy Storage, Energy Conversion and Gas Sensing Research

本提案旨在购买等离子体源，将现有的热原子层沉积设备升级为等离子体增强原子层沉积（PE-ALD）。升级后的PE-ALD系统将具有前所未有的纳米级薄膜沉积能力。它将用于加强UBC奥肯那根校区工程和化学系三个主题研究项目的研究创新和学生培训——能源存储、能源转换和气体传感。******能源转换和储存系统在可再生能源的部署和减少温室气体排放方面发挥着关键作用。气体传感器越来越多地用于检测污染物、有毒化合物和爆炸物，以监测空气质量和家庭安全。然而，这些技术的可持续商业化仍然受到其低效率、实际能量密度或灵敏度的限制。这些技术的性能在很大程度上取决于气-液-固界面，离子和/或电子的传输发生在该界面上。为了进一步提高它们的性能，探索新兴的材料和概念来设计稳定的、纳米级的、高效的界面是至关重要的。******通过这种等离子体升级，PE-ALD将能够在更低的沉积温度下沉积新的功能材料（含固体电解质、金属氮化物、硫化物和硒化物的N和S）和更高质量的薄膜，从而为可充电电池、太阳能电池和气体传感器的界面设计提供增强的能力。这不仅将加速这些技术的商业部署，而且还将推进基础界面科学的知识。研究创新对于所有加拿大人实现更环保、更安全、更好的生活方式至关重要。**

This proposal is for the purchase of a plasma source to upgrade an existing Thermal Atomic Layer Deposition equipment to a Plasma-Enhanced Atomic Layer Deposition (PE-ALD). The upgraded PE-ALD system will have unprecedented capabilities for nanoscale thin film deposition. It will be used to enhance research innovation and student training for research programs in three themes - energy storage, energy conversion, and gas sensing – in the Engineering and Chemistry Departments at UBC Okanagan campus.******Energy conversion and storage systems play key roles in the deployment of renewable energy and the reduction of greenhouse gas emissions. Gas sensor devices are increasingly adopted to detect pollutants, toxic compounds and explosive for monitoring air quality and domestic safety. However, sustainable commercialization of these technologies remains limited by their low efficiency, practical energy density, or sensitivity. The performance of these technologies greatly depends on the gas-liquid-solid interfaces, at/across which transport of ions and/or electrons occur. To further improve their performance, it is critical to explore emerging new materials and concepts for designing stable, nanoscale, and efficient interfaces in these systems.******With this plasma upgrade, the PE-ALD will enable the deposition of new functional materials (N and S containing solid electrolytes, metal nitrides, sulfides and selenides) and higher-quality thin films at reduced deposition temperatures, therefore providing enhanced capabilities for interface design in rechargeable batteries, solar cells, and gas sensors. This will not only accelerate these technologies for commercial deployment, but also advance knowledge in fundamental interfacial science. The research innovations are important for enabling a greener, safer, and better lifestyle for all Canadians. **