Advanced instrumentation for multi-modal nanometric measurement inside SEM

纳米技术部门需要测量纳米材料 ** 和纳米结构物理特性的先进能力。例如，半导体工业需要探测纳米尺寸的晶体管以进行故障分析，锂离子电池开发需要表征电化学循环期间基于纳米材料的电极特性变化。我们的研究小组先前 ** 开发了一个闭环操作的纳米操纵系统，用于扫描电子显微镜（SEM）**，在SEM的纳米分辨率成像下进行纳米材料的操纵。在 ** 之前工作的基础上，我们将与日立高科技加拿大公司（HHTC）合作，在该项目中开发 ** 一种新仪器和许多纳米表征技术，这将首次在 **SEM成像下对纳米结构/材料进行 ** 全面的物理（电学、机械和热学）测量。该项目的目标是开发一种能够在SEM的高真空室内操作的多模态成像和纳米表征技术的新仪器。具体目标包括：**（1）开发具有低传感器发热和低漂移的纳米操纵仪器;（2）开发用于纳米电子结构的自动电探测的 ** 技术;（3）使仪器具有纳米材料热映射的 ** 能力;（4）应用仪器对SEM内的一维和二维纳米材料进行集成电路（IC）** 探测和热测量;（5）开发用于纳米电子结构的自动电探测的 ** 技术。（5）开发了一个AFM模块 **，使AFM原位成像，包括接触和轻敲模式扫描;（6）在 **SEM的高真空室内实现AFM-SEM相关成像和机械纳米压痕。这种功能强大的纳米仪器将在纳米电子、精密仪器、电池等行业中得到重要应用

The nanotechnology sector demands advanced capabilities for measuring physical properties of nanomaterials**and nanostructures. For instance, the semiconductor industry requires the probing of nanometer-sized**transistors for failure analysis, and lithium ion battery development requires characterization of**nanomaterials-based electrode property changes during electrochemical cycles. Our research group previously**developed a closed-loop operated nanomanipulation system for use inside scanning electron microscope (SEM)**to perform the manipulation of nanomaterials under SEM's nanometer resolution imaging. Building upon the**previous work, we will collaborate with Hitachi High-Technologies Canada (HHTC) in this project to develop**a new instrument and a number of nano characterization techniques, which will, for the first time, enable**comprehensive physical (electrical, mechanical, and thermal) measurements on nano structures/materials under**SEM imaging.**The goal of the project is to develop a new instrument capable of multi-modal imaging and nano**characterization techniques for operation inside the high vacuum chamber of SEM. Specific objectives include:**(1) To develop a nanomanipulation instrument with low sensor heat generation and low drift; (2) To develop**techniques for automated electrical probing of nanoelectronic structures; (3) To equip the instrument with the**capability of thermal mapping on nanomaterials; (4) To apply the instrument to perform integrated circuit (IC)**probing and thermal measurement on 1D and 2D nanomaterials inside SEM; (5) To develop an AFM module**for the instrument to enable in-situ AFM imaging, including both contact and tapping mode scanning; (6) To**enable AFM-SEM correlative imaging and mechanical nanoindentation inside the high vacuum chamber of**SEM. This powerful nano instrument will find important applications in such industries as nano electronics,**precision instrumentation, batteries etc