Advanced instrumentation for multi-modal nanometric measurement inside SEM

纳米技术部门需要测量纳米材料和纳米结构的物理特性的先进能力。例如，半导体工业需要探测纳米尺寸的晶体管进行故障分析，锂离子电池的开发需要表征电化学循环过程中基于纳米材料的电极性能变化。本研究小组先前开发了一个用于扫描电子显微镜（SEM）内部的闭环操作纳米操纵系统，以在SEM的纳米分辨率成像下执行纳米材料的操纵。在以前工作的基础上，我们将与日立高科技加拿大公司（HHTC）合作开发一种新的仪器和一些纳米表征技术，这将首次实现全面的物理测量。（电气，机械，该项目的目标是开发一种新的仪器，能够在扫描电镜成像下对纳米结构/材料进行多方面的测量。模态成像和纳米表征技术，用于在SEM的高真空室内操作。具体目标包括：（1）研制具有低传感器发热和低漂移的纳米操纵仪器;（2）发展纳米电子结构的自动电探测技术;（3）使仪器具备对纳米材料进行热成像的能力;（4）应用仪器对SEM内部的一维和二维纳米材料进行集成电路（IC）探测和热测量;（5）研制了一种AFM原位成像模块，包括接触式和轻敲式两种扫描方式：（6）实现了AFM-SEM相关成像和SEM高真空室内的机械纳米压痕。这种功能强大的纳米仪器将在纳米电子、精密仪器、电池等行业中得到重要的应用

The nanotechnology sector demands advanced capabilities for measuring physical properties of nanomaterialsand nanostructures. For instance, the semiconductor industry requires the probing of nanometer-sizedtransistors for failure analysis, and lithium ion battery development requires characterization ofnanomaterials-based electrode property changes during electrochemical cycles. Our research group previouslydeveloped a closed-loop operated nanomanipulation system for use inside scanning electron microscope (SEM)to perform the manipulation of nanomaterials under SEM's nanometer resolution imaging. Building upon theprevious work, we will collaborate with Hitachi High-Technologies Canada (HHTC) in this project to developa new instrument and a number of nano characterization techniques, which will, for the first time, enablecomprehensive physical (electrical, mechanical, and thermal) measurements on nano structures/materials underSEM imaging.The goal of the project is to develop a new instrument capable of multi-modal imaging and nanocharacterization techniques for operation inside the high vacuum chamber of SEM. Specific objectives include:(1) To develop a nanomanipulation instrument with low sensor heat generation and low drift; (2) To developtechniques for automated electrical probing of nanoelectronic structures; (3) To equip the instrument with thecapability of thermal mapping on nanomaterials; (4) To apply the instrument to perform integrated circuit (IC)probing and thermal measurement on 1D and 2D nanomaterials inside SEM; (5) To develop an AFM modulefor the instrument to enable in-situ AFM imaging, including both contact and tapping mode scanning; (6) Toenable AFM-SEM correlative imaging and mechanical nanoindentation inside the high vacuum chamber ofSEM. This powerful nano instrument will find important applications in such industries as nano electronics,precision instrumentation, batteries etc