Deep Level Transient Spectroscopy for Semiconductor Device Development

所要求的深能级瞬态光谱（DLTS）系统将支持当前和未来的研究活动，为科学和商业应用开发半导体器件。经过四十多年的发展，DLTS方法是一种用于识别导致器件信号质量严重恶化的陷阱缺陷的强大工具。DLTS系统的基本组成部分是一个温度控制的低温恒温器，快速测量单元和计算机控制的DAQ和分析系统。* 系统将被安置在卡尔顿大学的微制造设施（Micro-fabrication Facility，简称MFF）中。DLTS系统将定期支持来自卡尔顿大学、渥太华大学、核管理委员会和工业界的小组对半导体器件的研究。它将立即促进4个卡尔顿物理系和2个电子系教师的合作研究工作，以开发半导体器件在恶劣环境条件下运行的创新技术。这代表了卡尔顿物理和电子部门研究范式的重大转变，将ECOFF置于CERN和SNOLAB三个国际合作的中心，并允许在星载设备，核辐射源和研究反应堆和光束线中的潜在技术应用。通过2个CFI-IF，1个CFREF，3个NSERC-Discovery和3个NSERC-RTI亚原子物理学赠款以及CERN和AIDA-2020欧洲框架的额外资助，强调了这项研究的重要性。它也证明了签约研究人员的卓越水平。如果没有DLTS系统，这种增加的研究活动将不得不缩减，不可避免地削弱我们交付研究计划的能力，并最终参与SNOLAB和CERN未来的研究工作。此外，缺乏最先进的设备抑制了顶尖学生的招聘，并严重限制了卡尔顿的微制造设施对外部研究小组进行合作研究的吸引力。这可能会使加拿大这项重要研究投资的长期可行性受到质疑。由于DLTS系统将使新的查询和合作，它将导致新的研究能力。我们预计，在未来五年内，平均每年有12名HQP利用该系统进行研究或研究生课程工作。DLTS系统将通过允许50个B.Eng./ B.Sc.学生每年接受培训的一部分，他们的荣誉的或正常的课程实验室项目。DLTS方法的结果在同行评审的期刊上非常容易发表，并且在会议上发表时立即引起关注。经过培训的学生将拥有更好的就业前景，在高科技行业以及航空航天，国防和通信行业特别理想的技能。

The requested Deep Level Transient Spectroscopy (DLTS) system will support current and future research activities on the development of semi-conductor devices for scientific and commercial applications. Over forty years in development, the DLTS method is a powerful tool for identifying trapping defects that lead to severe deterioration of the device signal quality. The basic components of a DLTS system are a temperature-controlled cryostat, fast measurement units and a computer-controlled DAQ and analysis system. The ***system will be housed in Carleton University's micro-fabrication facility (CUMFF).******The DLTS system will regularly support the research on semi-conductor devices by groups from Carleton University, the University of Ottawa, the NRC and industry. It will immediately facilitate the collaborative research effort of 4 Carleton Physics Department and 2 Department of Electronics faculty to develop innovative technologies for semi-conductor devices to operate under adverse environmental conditions. This represents a major shift in the Carleton Physics and Electronics Departments research paradigm, places the CUMFF at the center of three international collaborations at CERN and SNOLAB and allows for potential technology applications in space-borne devices, nuclear spallation sources and research reactors and beamlines. The significance of this research is underlined by the funding awarded through 2 CFI-IF, 1 CFREF, 3 NSERC-Discovery and 3 NSERC-RTI subatomic physics grants and by additional funding from CERN and the AIDA-2020 European framework. It also attests to the level of excellence of the signing researchers.******Without a DLTS system this increased research activity will have to be scaled back inevitably undermining our ability to deliver our research program and eventually participate***in future research endeavors at SNOLAB and CERN. Furthermore, the lack of state-of-the-art equipment inhibits the recruitment of top students and severely limits the attractiveness of Carleton's micro-fabrication facility to external research groups to pursue collaborative research. This may place the long-term viability of this important Canadian research investment into question.******As the DLTS system will enable new inquiries and collaborations, it will result to new research capabilities. We expect an average of 12 HQPs per year to utilize the system in the next five years for research or graduate course work. The DLTS system will further enhance the educational value of CUMFF by allowing 50 B.Eng./B.Sc. students per year to receive training as part of their honor's or regular course laboratory projects. Results of the DLTS method are highly publishable in peer-reviewed journals and attract instant attention when presented at conferences. Trained students will have improved job prospects with skillsets particularly desirable in the high-tech industry and in aerospace, defense and communications industries.