Deep Level Transient Spectroscopy for Semiconductor Device Development

所要求的深能级瞬变光谱(DLTS)系统将支持目前和未来在开发用于科学和商业应用的半导体设备方面的研究活动。经过40多年的发展，DLTS方法是一种强大的工具，用于识别导致设备信号质量严重恶化的陷阱缺陷。DLTS系统的基本组件是温度控制的低温恒温器、快速测量装置和计算机控制的数据采集和分析系统。*系统将安装在卡尔顿大学的微制造设施(CUMFF)中。*DLTS系统将定期支持来自卡尔顿大学、渥太华大学、NRC和工业界的小组对半导体设备的研究。它将立即促进4个Carleton物理系和2个电子系教员的合作研究工作，开发半导体设备在恶劣环境条件下运行的创新技术。这代表着Carleton物理和电子系研究范式的重大转变，将CUMFF置于CERN和SNOLAB三个国际合作的中心，并允许潜在的技术应用于空间设备、核散裂源以及研究反应堆和光束线。通过2个CFI-IF、1个CFREF、3个NSERC-Discovery和3个NSERC-RTI亚原子物理赠款以及欧洲核子研究中心和AIDA-2020欧洲框架提供的额外资金，突显了这项研究的重要性。这也证明了签约研究人员的卓越水平。*如果没有DLTS系统，这一增加的研究活动将不得不缩减，这将不可避免地削弱我们交付研究计划并最终参与SNOLAB和CERN未来研究工作的能力。此外，缺乏最先进的设备阻碍了对顶尖学生的招聘，并严重限制了卡尔顿的微制造设施对外部研究小组进行合作研究的吸引力。这可能会使加拿大这项重要研究投资的长期可行性受到质疑。*由于DLTS系统将实现新的查询和合作，它将带来新的研究能力。我们预计，在未来五年内，平均每年将有12名HQP使用该系统进行研究或研究生课程工作。DLTS系统将通过允许50个工程/理科学士学位来进一步提高CUMFF的教育价值。学生每年接受培训，作为他们荣誉或常规课程实验室项目的一部分。DLTS方法的结果在同行评议的期刊上高度可发表，并在会议上发表时立即引起注意。受过培训的学生将改善就业前景，拥有高科技行业以及航空航天、国防和通信行业特别令人向往的技能。

The requested Deep Level Transient Spectroscopy (DLTS) system will support current and future research activities on the development of semi-conductor devices for scientific and commercial applications. Over forty years in development, the DLTS method is a powerful tool for identifying trapping defects that lead to severe deterioration of the device signal quality. The basic components of a DLTS system are a temperature-controlled cryostat, fast measurement units and a computer-controlled DAQ and analysis system. The ***system will be housed in Carleton University's micro-fabrication facility (CUMFF).******The DLTS system will regularly support the research on semi-conductor devices by groups from Carleton University, the University of Ottawa, the NRC and industry. It will immediately facilitate the collaborative research effort of 4 Carleton Physics Department and 2 Department of Electronics faculty to develop innovative technologies for semi-conductor devices to operate under adverse environmental conditions. This represents a major shift in the Carleton Physics and Electronics Departments research paradigm, places the CUMFF at the center of three international collaborations at CERN and SNOLAB and allows for potential technology applications in space-borne devices, nuclear spallation sources and research reactors and beamlines. The significance of this research is underlined by the funding awarded through 2 CFI-IF, 1 CFREF, 3 NSERC-Discovery and 3 NSERC-RTI subatomic physics grants and by additional funding from CERN and the AIDA-2020 European framework. It also attests to the level of excellence of the signing researchers.******Without a DLTS system this increased research activity will have to be scaled back inevitably undermining our ability to deliver our research program and eventually participate***in future research endeavors at SNOLAB and CERN. Furthermore, the lack of state-of-the-art equipment inhibits the recruitment of top students and severely limits the attractiveness of Carleton's micro-fabrication facility to external research groups to pursue collaborative research. This may place the long-term viability of this important Canadian research investment into question.******As the DLTS system will enable new inquiries and collaborations, it will result to new research capabilities. We expect an average of 12 HQPs per year to utilize the system in the next five years for research or graduate course work. The DLTS system will further enhance the educational value of CUMFF by allowing 50 B.Eng./B.Sc. students per year to receive training as part of their honor's or regular course laboratory projects. Results of the DLTS method are highly publishable in peer-reviewed journals and attract instant attention when presented at conferences. Trained students will have improved job prospects with skillsets particularly desirable in the high-tech industry and in aerospace, defense and communications industries.