Development of environmentally robust and thermally stable Microelectromechanical Systems (MEMS) based accelerometer for automotive applications

这一合作伙伴关系的目标是为汽车应用开发一种具有成本效益、稳定和防震的微型加速度计。基于微电子机械系统(MEMS)的加速度计是一种可以检测微小惯性运动的小型传感器。它们广泛应用于汽车上，如稳定性控制、安全气囊展开和碰撞检测。汽车应用要求加速度计在非常恶劣的环境中工作，包括振动、冲击、温度和热循环。尽管低成本的MEMS加速度计激增，但它们仍然存在低温稳定性、噪音和抗震性等问题。随着汽车自主化和电动化的不断推进，对精密、坚固但具有成本效益的传感器的需求也在不断增长。MEMS加速度计使用谐振硅质量作为传感元件。硅基MEMS谐振器的主要问题是其固有的低热稳定性。目前，在性价比高的MEMS加速度计中，还没有固定的设计方法来提高稳定性和抗冲击性。为了克服上述局限性，本研究旨在采取一种开创性的方法，利用坚固的机械材料和新颖的传感器设计相结合，在降低成本的同时实现热稳定性和冲击稳定性。NSERC联盟的这笔赠款将是合作伙伴行业与温莎大学首次合作，开发一种基于MEMS的坚固耐用的温度和冲击稳定性加速度计。预计这也将在其他类似的汽车惯性传感器中产生连锁反应，包括陀螺仪和惯性测量单元。这将给加拿大人带来重大好处，因为它将直接帮助在新兴的自主导航领域创新亟需的高性能和高成本效益的微型传感器系统，预计将增加加拿大在这一领域的竞争力。这将使加拿大在高精度和稳定的加速度传感器开发方面处于全球领先地位。

The goal of this partnership is to develop a cost effective, stable and shock immune micro accelerometers for automotive applications. Microelectromechanical systems (MEMS) based accelerometers are small sensors that can detect small inertial movements. They are widely used in automotive such as for stability control, air-bag deployment and crash detection. Automotive applications require accelerometers to work in quite harsh environment involving vibration, shock, temperature, and thermal cycling. Despite the surge in low-cost MEMS accelerometers, they still suffer from low temperature stability, noise and shock immunity. With the ever-increasing thrust for autonomy and electrification of vehicles the demand for precision, robust but cost-effective sensors is growing. MEMS accelerometers use a resonating silicon mass as the sensing element. The major issue with the silicon-based MEMS resonator is its inherent low thermal stability. Currently, there is no fixed design approach available to enhance the stability and shock immunity in cost-effective MEMS accelerometers. To overcome the above-mentioned limitations, this research aims to take a ground-breaking approach by utilizing robust mechanical materials combined with novel sensor design to achieve thermal and shock stability as well as lower the cost. This NSERC Alliance grant will be a first-time collaboration between the partner industries and the University of Windsor to develop a robust MEMS based accelerometer for temperature and shock stability. It is also expected to create a ripple effect in other similar automotive inertial sensors including gyroscopes and inertial measurement units. There will be major benefits to Canadians as it will directly assist the innovation of much-needed high-performance and cost-effective micro-sensor systems in the emerging area of autonomous navigation, and it is expected to increase Canada's competitiveness in this area. It will put Canada in a leadership role in the global arena in the high precision and stable acceleration sensor development.