High Sensitivity MEMS based Resonant Gyroscopes

基于MEMS（微机电系统）的谐振惯性传感元件，如陀螺仪，广泛应用于许多消费，工业，汽车和生物医学应用。谐振器是在振动陀螺仪中充当传感元件的振荡质量。在设备运行期间，谐振器需要处于不振荡状态。由于阻尼（内部/外部）造成的能量损失会降低谐振器的振荡从而降低性能。因此，最小化振荡期间的阻尼对于实现更高的灵敏度至关重要。不同类型的能量损失影响阻尼，包括锚损失、挤压膜效应和热弹性阻尼（TED）。特别是，当前的问题涉及到设计考虑，以减少阻尼，特别是，TED。量化谐振器阻尼的一个性能参数称为质量因子(Q)，它提供了谐振器在振荡期间保持能量的效率的度量。用于高性能运动传感应用的惯性传感器需要通过最小化能量损失来最大化其Q。因此，对Q损失机制的坚定理解是最大化Q（达到100万）的关键。最近，Nxtsens Microsystems开发了Q值为100k的原型机。Nxtsens现在的目标是高灵敏度设备，高性能谐振陀螺仪需要Q达到100万。为了设计这样的器件，必须分析和优化其设计上的不同损耗机制。这个NSERC Engage项目将是Nxtsens和dr。该方法将为Nxtsens提供宝贵的知识和反馈，显示出修改其设计以达到高端应用的途径。它还将通过展示影响谐振陀螺仪性能的设计和材料参数之间的关系，为学术界和工业界提供更大的科学见解。这将促进基于MEMS的高精度谐振陀螺仪的进一步发展。

MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes arewidely used in many consumer, industrial, automotive and biomedical applications. A resonator is anoscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be inoscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator'soscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving highersensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, andThermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reducedamping, and specifically, TED. One performance parameter that quantifies resonators damping is calledQuality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy duringoscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q byminimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Q(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k.Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performanceresonant gyroscopes. In order to design such devices different loss mechanisms on their design have to beanalyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens andDr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematicallyprovide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens withvaluable knowledge and feedback showing a path to modify their design to reach high end applications. Itwould also provide greater scientific insights to the academic and industry community by showing relationshipsbetween design and material parameters that effect performance in resonant gyroscopes. It would facilitatefurther development of MEMS based high precision resonant gyroscopes.