High Sensitivity MEMS based Resonant Gyroscopes

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MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes arewidely used in many consumer, industrial, automotive and biomedical applications. A resonator is anoscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be inoscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator'soscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving highersensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, andThermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reducedamping, and specifically, TED. One performance parameter that quantifies resonators damping is calledQuality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy duringoscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q byminimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Q(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k.Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performanceresonant gyroscopes. In order to design such devices different loss mechanisms on their design have to beanalyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens andDr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematicallyprovide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens withvaluable knowledge and feedback showing a path to modify their design to reach high end applications. Itwould also provide greater scientific insights to the academic and industry community by showing relationshipsbetween design and material parameters that effect performance in resonant gyroscopes. It would facilitatefurther development of MEMS based high precision resonant gyroscopes.