High Sensitivity MEMS based Resonant Gyroscopes

基于 MEMS 的高灵敏度谐振陀螺仪

• 批准号: 513806-2017
• 负责人: Ahamed, Mohammed
• 金额: $ 1.78万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=639989
• 关键词: Sensitivity; MEMS; based; Resonant; Gyroscopes

MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes arewidely used in many consumer, industrial, automotive and biomedical applications. A resonator is anoscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be inoscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator'soscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving highersensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, andThermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reducedamping, and specifically, TED. One performance parameter that quantifies resonators damping is calledQuality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy duringoscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q byminimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Q(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k.Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performanceresonant gyroscopes. In order to design such devices different loss mechanisms on their design have to beanalyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens andDr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematicallyprovide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens withvaluable knowledge and feedback showing a path to modify their design to reach high end applications. Itwould also provide greater scientific insights to the academic and industry community by showing relationshipsbetween design and material parameters that effect performance in resonant gyroscopes. It would facilitatefurther development of MEMS based high precision resonant gyroscopes.

基于MEMS（微机电系统）的谐振惯性传感元件（例如陀螺仪）广泛用于许多消费者、工业、汽车和生物医学应用中。谐振器是振动陀螺仪中作为传感元件的振荡质量。谐振器需要在器件工作期间不振荡。由于阻尼（内部/外部）而损失的能量会降低谐振器的振荡，从而降低性能。因此，在振荡过程中最大限度地减少阻尼是实现更高灵敏度的关键。不同类型的能量损失影响阻尼，包括锚损失，挤压膜效应，和热弹性阻尼（TED）。特别地，当前的问题涉及对减小的放大的设计考虑，并且具体地涉及TED。量化谐振器阻尼的一个性能参数称为品质因数（Q），其提供了谐振器在振荡期间保持能量的效率的度量。高性能运动传感应用中使用的惯性传感器需要通过最小化能量损失来最大化其Q。因此，对Q损失机制的深刻理解是最大化Q（达到100万）的关键。最近，Nxtsens微系统公司已经开发出了Q值为100 k的样机。Nxtsens现在的目标是高灵敏度器件，要求Q值达到100万，用于高性能谐振陀螺仪。为了设计这种器件，必须分析和优化其设计中的不同损耗机制.这个NSERC参与项目将是Nxtsens和Dr.温莎大学的Jalal Ahamed开发了优化方法，该方法将系统地为具有高Q值的谐振陀螺仪提供改进的几何形状。该方法将为Nxtsens提供有价值的知识和反馈，显示修改其设计以达到高端应用的路径。它还将通过展示影响谐振陀螺仪性能的设计和材料参数之间的关系，为学术界和工业界提供更深入的科学见解。这将有助于进一步发展基于MEMS的高精度谐振陀螺仪。