Development of wireless sensors using microfabrication techniques

拟议项目的目标是使用微制造工艺开发用于工业物联网（IoT）应用的新型无线半导体传感器。该项目是西蒙弗雷泽大学（SFU）工程科学学院的阿达奇博士团队与工业合作伙伴EPIC半导体公司的共同努力。 一个示例应用是将无线传感器集成到汽车轮胎中，可以确定轮胎下方的地形类型。半导体传感器将通过微电子制造工艺制造，包括薄膜沉积、光刻和蚀刻，这提供了低成本生产的可扩展性和批量制造的优点。预期的成果包括开发新的微型扭矩和压力传感器技术，这些技术是自供电的，并与附近的移动终端进行无线通信。工业合作伙伴将获得新的传感技术，并利用研究团队的专业知识和制造技术。一个由7名学生组成的团队（2名博士生和5名本科生）将获得实践行业相关技能，如半导体器件原型设计，制造和电气特性。学生的培训经验将通过与工业合作伙伴的工程团队定期互动获得的工业经验来增强。新的无线传感器技术的发展可能会为加拿大人带来新的商业产品和高科技领域的新工作。该项目的成功完成将实现加拿大政府就业、增长和恢复计划的三个目标：支持小型企业投资新技术，以满足客户需求，保持竞争力，加强对年轻人的培训。

The objective of the proposed project is to develop new wireless semiconductor sensors for industrial Internet of Things (IoT) applications using microfabrication processes. The proposed project is a joint effort between Dr. Adachi's team in the School of Engineering Science, Simon Fraser University (SFU) and industrial partner, EPIC Semiconductors, Inc. An example application is the integration of wireless sensors into automotive tires that can determine the type of terrain underneath them. The semiconductor sensors will be fabricated by microelectronic fabrication processes including thin film deposition, photolithography, and etching, which offer the advantage of scalability and batch fabrication for low-cost production. Anticipated outcomes include the development of new miniature torque and pressure sensor technologies which are self-powered and communicate wirelessly to a nearby mobile device. The industrial partner will acquire new sensing technology and leverage the expertise and fabrication know-how of the research team. A team of 7 students (2 PhD students and 5 Undergraduate students) will gain hands-on industry-relevant skills such as semiconductor device prototyping, fabrication, and electrical characterization. The student's training experience will be enhanced by industrial experience gained through regular interactions with the engineering team at the industrial partner. The development of the new wireless sensor technologies may lead to a new commercial product and new jobs in the high-tech sector for Canadians. A successful completion of this project will achieve three goals of the Canadian government's Recovery Plan for Jobs, Growth, and Resilience: the support of a small sized business investment in new technologies for meeting customer needs, staying competitive, and enhance training of young people.