Measurement of Electro-Optical Properties of Aluminum-Gallium-Nitride for Integrated Optics Devices (Materials Research)

用于集成光学器件的氮化铝镓电光特性的测量（材料研究）

• 批准号: 8760768
• 负责人: Asif Khan
• 金额: $ 4.84万
• 依托单位: APA Optics Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1988
• 资助国家: 美国
• 起止时间: 1988-01-01 至 1988-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8760768&HistoricalAwards=false
• 关键词: Measurement; Electro; Optical; Properties; Aluminum

This SBIR Phase I Award emphasizes research on processing of single mode waveguides in aluminum gallium nitride and measurement of the electro-optical properties of these materials. The waveguides will be deposited using low pressure metalorganic chemical vapor deposition and characterized using computer controlled test facilities for electrical resistivity, thickness and chemical composition (sputter Auger), optical losses (prism coupling technique). Due to its large band gap, aluminum gallium nitride has potential for application as solar-blind ultraviolet detectors and ultraviolet filters, solid state laser scanners, and thin film miniature ultraviolet spectrometers.

SBIR第一阶段奖重点研究氮化铝镓单模波导的加工和这些材料的电光性能的测量。这种波导将使用低压金属有机化学气相沉积沉积，并使用计算机控制的测试设备对其进行表征，包括电阻率、厚度和化学成分(溅射俄歇)、光学损耗(棱镜耦合技术)。由于具有较大的禁带宽度，氮化镓在日盲紫外探测器、紫外滤光片、固体激光扫描仪、薄膜微型紫外光谱仪等方面具有潜在的应用前景。