Measurement of Electro-Optical Properties of Aluminum-Gallium-Nitride for Integrated Optics Devices (Materials Research)

SBIR第一阶段的奖励重点是研究氮化镓铝单模波导的加工和测量这些材料的电光特性。波导将采用低压金属有机化学气相沉积沉积，并使用计算机控制的电阻率、厚度和化学成分（溅射俄歇）、光学损耗（棱镜耦合技术）测试设备进行表征。由于氮化镓铝具有较大的带隙，因此在太阳盲紫外探测器和紫外滤光器、固体激光扫描仪和薄膜微型紫外光谱仪等方面具有潜在的应用前景。

This SBIR Phase I Award emphasizes research on processing of single mode waveguides in aluminum gallium nitride and measurement of the electro-optical properties of these materials. The waveguides will be deposited using low pressure metalorganic chemical vapor deposition and characterized using computer controlled test facilities for electrical resistivity, thickness and chemical composition (sputter Auger), optical losses (prism coupling technique). Due to its large band gap, aluminum gallium nitride has potential for application as solar-blind ultraviolet detectors and ultraviolet filters, solid state laser scanners, and thin film miniature ultraviolet spectrometers.