Measurement of Electro-Optical Properties of Aluminum-Gallium-Nitride for Integrated Optics Devices (Materials Research)

该SBIR第一阶段奖强调对加工的研究， 氮化铝镓中的单模波导， 测量这些材料的电光特性。 波导将使用低压金属有机沉积 化学气相沉积和计算机表征 电阻率、厚度、 和化学成分（溅射俄歇），光学损耗（棱镜 耦合技术）。 由于其大的带隙，氮化铝镓具有 作为日盲紫外探测器的应用潜力 和紫外线过滤器，固态激光扫描仪， 薄膜微型紫外光谱仪。

This SBIR Phase I Award emphasizes research on processing of single mode waveguides in aluminum gallium nitride and measurement of the electro-optical properties of these materials. The waveguides will be deposited using low pressure metalorganic chemical vapor deposition and characterized using computer controlled test facilities for electrical resistivity, thickness and chemical composition (sputter Auger), optical losses (prism coupling technique). Due to its large band gap, aluminum gallium nitride has potential for application as solar-blind ultraviolet detectors and ultraviolet filters, solid state laser scanners, and thin film miniature ultraviolet spectrometers.