Engineering Research Equipment Grant: Diffusion Furnace System

建议开发1)适合于测量固定化细胞层局部浓度分布的微探头，2)稳定的、流动不敏感的、可蒸汽灭菌的溶解氧传感器，3)利用微电路制造技术开发微型机电阀门和泵。拟议的用于测量固定化细胞附近微环境条件的微探测器有望显著扩大固定化细胞过程的研究范围。建议的DO传感器将特别适用于监测哺乳动物细胞培养和固定化细胞反应器中的溶解氧，在这些反应器中无法提供足够的介质流量。拟议的微型机电阀门和泵将是在硅片上开发复杂仪器的关键，硅片可以为各种应用大规模生产。为了成功地开展所提出的研究，需要一个能够氧化硅片和化学气相沉积的扩散炉系统。

It is proposed to develop 1) microprobes suitable for measuring local concentration profiles in immobilized cell layers, 2) a stable, flow-insensitive, steam-sterilizable dissolved oxygen sensor, and 3) microminiature electromechanical valves and pumps by making use of microcircuit fabrication technology. The proposed microprobes for measuring microenvironmental conditions in the immediate vicinity of the immobilized cells are expected to significantly expand the scope of research with immobilized cell processes. The proposed DO sensor will be particularly useful for monitoring dissolved oxygen in mammalian cell cultures and in immobilized cell reactors where sufficient medium flow cannot be provided. The proposed microelectromechanical valves and pumps will be essential for developing sophisticated instruments on a silicon wafer, which can be mass produced for a variety of applications. To carry out the proposed research successfully, a diffusion furnace system capable of oxidation of silicon wafers and chemical vapor deposition is requested.