Engineering Research Equipment Grant: Diffusion Furnace System

工程研究设备资助：扩散炉系统

• 批准号: 8906589
• 负责人: Young Lee
• 金额: $ 1.21万
• 依托单位: Drexel University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-07-15 至 1990-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8906589&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Grant; Diffusion

It is proposed to develop 1) microprobes suitable for measuring local concentration profiles in immobilized cell layers, 2) a stable, flow-insensitive, steam-sterilizable dissolved oxygen sensor, and 3) microminiature electromechanical valves and pumps by making use of microcircuit fabrication technology. The proposed microprobes for measuring microenvironmental conditions in the immediate vicinity of the immobilized cells are expected to significantly expand the scope of research with immobilized cell processes. The proposed DO sensor will be particularly useful for monitoring dissolved oxygen in mammalian cell cultures and in immobilized cell reactors where sufficient medium flow cannot be provided. The proposed microelectromechanical valves and pumps will be essential for developing sophisticated instruments on a silicon wafer, which can be mass produced for a variety of applications. To carry out the proposed research successfully, a diffusion furnace system capable of oxidation of silicon wafers and chemical vapor deposition is requested.

建议利用微电路制造技术，开发1)适合测量固定化细胞层局部浓度分布的微探针；2)稳定、流量不敏感、可蒸汽灭菌的溶解氧传感器；3)微型机电阀和泵。所提出的用于测量固定化细胞附近微环境条件的微探针有望显著扩大固定化细胞过程的研究范围。所提出的溶解氧传感器将特别适用于监测哺乳动物细胞培养物和固定细胞反应器中无法提供足够介质流量的溶解氧。所提出的微机电阀和泵对于在硅片上开发复杂的仪器至关重要，硅片可以大规模生产用于各种应用。为了成功地进行所提出的研究，需要一种能够氧化硅片和化学气相沉积的扩散炉系统。