An Aerosal Process for Fabrication of Monosized GaAs QuantumCluster Dots

制造单尺寸砷化镓量子簇点的气雾工艺

• 批准号: 8912328
• 负责人: Richard Flagan
• 金额: $ 44.84万
• 依托单位: California Institute of Technology
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-10-01 至 1992-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8912328&HistoricalAwards=false
• 关键词: Aerosal; Process; Fabrication; Monosized; GaAs

A quantum cluster dot is a compact structure in the 5 to 20 um size range where small scale in three dimensions yields discrete electronic states. This research is an interdisplinary, experimental program for the formation and characterization of monodisperse gallium arsenide (G A ) quantum cluster dots. The clusters will be produced in an aerosol reactor by the vapor phase reaction of an organometallic gallium contains vapor with arsine. Particle size and cluster quality will be monitored by in-situ laser induced luminescence spectra. Clusters from the aerosol reactor will be classified into very narrow size ranges required for applications by an electrostatic classifier. Captured particles will be analyzed as to particle morphology, interval defect structure, and carbon contamination using electron microscopy (TEM and STEM), energy dispersive X-ray analysis (EDAX), and electron energy loss spectroscopy (EELS). Exciting new electronic and optical components would result from the incorporation of large numbers of identical quantum cluster dots into solid state structures. Possible applications include semiconductor lasers several orders of magnitude better than conventional diode lasers and new electroluminescent display technology with convenient adjustment of color. However, to achieve such results, the clusters must be produced to very strict size tolerances, typically with size variations not larger than 0.5 um. Otherwise a device averaging the electronic states of many clusters varying in size would lose the distinctness of states inherent in any individual quantum cluster dot.

量子簇点是一种在5到20微米大小范围内的紧凑结构，其中三维小尺度产生离散的电子态。本研究是关于单分散砷化镓(GA)量子簇点的形成和表征的跨学科的实验计划。这些团簇将在气溶胶反应器中由含有砷的有机金属镓蒸汽的气相反应产生。颗粒大小和团簇质量将通过原位激光诱导发光光谱进行监测。静电分级器将把气溶胶反应器中的团簇分类成应用所需的非常窄的尺寸范围。捕获的颗粒将使用电子显微镜(TEM和STEM)、能量色散X射线分析(EDAX)和电子能量损失谱(EELS)分析颗粒形貌、间隔缺陷结构和碳污染。将大量相同的量子簇点结合到固态结构中，将产生令人兴奋的新的电子和光学元件。可能的应用包括半导体激光器，比传统二极管激光器高出几个数量级，以及方便地调整颜色的新型电致发光显示技术。然而，为了实现这样的结果，必须按照非常严格的尺寸公差来生产团簇，通常尺寸变化不大于0.5um。否则，一个平均许多大小不同的团簇的电子态的设备将失去任何单个量子团簇中固有的状态的清晰度。