Photobleachable Host-Guest Thin Films for Optical Waveguides

用于光波导的可光漂白主客体薄膜

• 批准号: 9160294
• 负责人: Bret Halpern
• 金额: $ 5万
• 依托单位: Jet Process Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-01-15 至 1992-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9160294&HistoricalAwards=false
• 关键词: Photobleachable; Host; Guest; Thin; Films

Optical integrated circuits will be at the heart of future high speed fiber optic communications. These circuits require thin film optical components such as waveguides, couplers, and multiplexers. However, at present there exists no technique for fabrication of thin film components that is simple, fast, versatile, reliable and inexpensive. The most basic optical component is the thin film passive waveguide, in which channels of different index of refraction, patterned in a thin film, serve to conduct lightwaves. A straightforward low - cost technique for making waveguides would have wide applicability to hybrid optical integrated circuits, since other optical components could be generated with the same technology. In Phase I we demonstrate a novel waveguide fabrication method. We will use thin films of SiNx, Si0x, and SiCx that have been photosensitized by incorporation of bleachable organic dyes. These films will be masked and exposed to radiation; the resulting waveguide structures will be tested and evaluated. Bleaching of embedded dyes has been used to pattern polymer films. The innovative element in our process is the use of hard "glass" host-guest films, made by Jet Vapor Deposition. JVD allows room temperature deposition of dye-doped glass films on existing silicon based microelectronic circuits. JVD also has advantages in speed, flexibility and cost over sol-gel, CVD and high vacuum sputtering approaches. Successful completion of this project will advance the development of hybrid integrated optical circuits for fiber optic communications.

光学集成电路将成为未来高性能 加快光纤通信。 这些电路需要薄 薄膜光学元件，如波导、耦合器和 多路复用器 然而，目前还没有技术 薄膜元件的制造简单、快速， 通用、可靠且价格低廉。 最基本的光学 元件是薄膜无源波导，其中通道 具有不同折射率的薄膜， 来传导光波 一种简单的低成本技术 用于制造波导将具有广泛的适用性， 光学集成电路，因为其他光学元件可以 用同样的技术生产。 在第一阶段，我们展示了一种新的波导制造方法。 我们将使用SiNx、SiOx和SiCx薄膜， 通过掺入可漂白的有机染料而光敏化。 这些胶片将被掩蔽并暴露于辐射; 将测试和评估所得的波导结构。 嵌入染料的漂白已被用于图案化聚合物 薄膜. 我们过程中的创新元素是使用硬 “玻璃”主客体薄膜，由喷射气相沉积法制成。 JVD 允许掺杂染料的玻璃膜在室温下沉积在 现有的硅基微电子电路。 JVD也有 在速度、灵活性和成本方面优于溶胶-凝胶、CVD和 高真空溅射方法。 成功完成本 项目将推进混合集成光学的发展 光纤通信电路。