Development of Scanning Probe Microscope Integrated with Scanning Electron Microscope for Probe Fabrication

扫描探针显微镜与扫描电子显微镜集成用于探针制造的开发

• 批准号: 9221637
• 负责人: Paul Hansma
• 金额: $ 24.57万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-02-15 至 1996-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9221637&HistoricalAwards=false
• 关键词: Development; Scanning; Probe; Microscope; Integrated

The objective of this project is to build an instrument that will allow rapid evolution of sharp and special purpose tips for scanning probe microscopes. This new instrument integrates a scanning probe microscope with a scanning electron microscope and ion mill for preparing, imaging and using probe tips. Of special interest are processes involving decomposition of gases and liquid films to form hard tips, ferroelectric tips, and magnetic tips. The significance is that almost all scanning probe measurements, expecially with the atomic force microscope, are limited now by the tip. For the atomic force microscope, there is no instrument presently available that allows researchers to do rapid tip development. The system proposed here will allow super tips to be optimized rapidly, a benefit to many users of the atomic force microscope.

该项目的目标是建立一个工具， 将允许锋利和特殊用途尖端的快速发展， 扫描探针显微镜这款新仪器集成了 具有扫描电子显微镜的扫描探针显微镜，以及 用于制备、成像和使用探针尖端的离子研磨机。 特殊 感兴趣是涉及气体和液体的分解的过程 膜以形成硬尖端、铁电尖端和磁性尖端。 重要的是，几乎所有的扫描探针测量， 特别是原子力显微镜，现在受到限制， tip. 对于原子力显微镜来说， 目前可用的，使研究人员能够做快速提示， 发展 这里提出的系统将允许超级提示 优化迅速，有利于许多用户的原子力 显微镜