Uncooled Infrared Detection with YBa2Cu30x Thin Films

9421969 Celik-Bulter首席研究人员将探索用于非制冷红外探测的YBa2Cu3Ox薄膜的非超导相。长期目标是在具有高隔热性和高响应性的微机械硅结构上建立热成像阵列。这将使得在同一芯片上执行辐射检测和信号处理的集成电路的制造成为可能。这些红外探测器将利用YBa2Cu3Ox(x=6)的缺氧相，并将在室温或接近室温下工作。我们将尝试两种不同的薄膜热探测器结构：半导体测辐射热计和热释电电容器。测辐射热计将由半导体YBa2Cu3Ox在SiO_2或Si3N_4上制成，并显示出随温度DR/DT的高电阻变化率。这项拟议研究的意义在于，拟议的探测器在室温下运行，而不需要制冷。由于它们可以在常温下通过射频溅射沉积，因此制造它们相对容易且成本低廉，并且与硅技术兼容。预计这项研究将有助于更好地理解非超导YBa2Cu3Ox的电子性质及其对氧化学计量比的依赖关系。这也将是首次将YBa2Cu3Ox红外探测器制作在气隙桥结构上。由于拟议的设备运行时不需要冷却，并且可以使用廉价的技术和材料制造，因此它将用于国防应用，成本较低，更适合民用需求，如夜间导航、安全或生物医学热成像。它们的低温对应物、超导测辐射热计和HgCdTe光伏或光导器件的制造成本很高，操作成本也很高。这项拟议的研究将与德州仪器公司和北德克萨斯大学合作进行。***

9421969 Celik-Bulter The principal investigators will explore the non-superconducting phases of YBa2Cu3Ox thin films for uncooled infrared detection applications. The long term goal is to build thermal imaging arrays on micromachined silicon structures with high thermal isolation and therefore high responsivity. This would enable the fabrication of integrated circuits where radiation detection and signal processing are performed on the same chip. These infrared detectors will utilize the oxygen deficient phase of YBa2Cu3Ox(x=6) and will be operated at or near room temperature. Two different thin film, thermal detector structures will be tried: semiconductor bolometers and pyroelectric capacitors. The bolometers will be made of semiconducting YBa2Cu3Ox on SiO2 or Si3N4 and exhibit a high rate of resistance change with temperature dR/dT. The significance of the proposed research lies in the fact that proposed detectors operators at room temperature without refrigeration. They are relatively easy and inexpensive to fabricate and compatible with silicon technology since they can be deposited at ambient temperature by rf sputtering. It is projected that the proposed research will lead to a better understanding of the electronic properties of nonsuperconducting YBa2Cu3Ox and their dependence upon oxygen stoichiometry. This proposal will be also be the first time where Yba2Cu3Ox IR detectors will be fabricated on air-gap bridge structures. Since the proposed devices do not require cooling for operation and can be fabricated using inexpensive techniques and materials, it will be less costly for defense applications and more suitable for civilian needs such as night-time navigation, security or biomedical thermal imaging. Their cryogenic counterparts, superconducting bolometers and HgCdTe photovoltaic or photoconductive devices are expensive to fabricate costly to operate. The proposed research will be in collaboration with Texas Instruments Inc. and University of North Texas. ***