Uncooled Infrared Detection with YBa2Cu30x Thin Films

使用 YBa2Cu30x 薄膜进行非制冷红外检测

• 批准号: 9421969
• 负责人: Zeynep Celik-Butler
• 金额: $ 33.29万
• 依托单位: Southern Methodist University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-05-15 至 1998-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9421969&HistoricalAwards=false
• 关键词: Uncooled; Infrared; Detection; YBa2Cu30x; Thin

9421969 Celik-Bulter The principal investigators will explore the non-superconducting phases of YBa2Cu3Ox thin films for uncooled infrared detection applications. The long term goal is to build thermal imaging arrays on micromachined silicon structures with high thermal isolation and therefore high responsivity. This would enable the fabrication of integrated circuits where radiation detection and signal processing are performed on the same chip. These infrared detectors will utilize the oxygen deficient phase of YBa2Cu3Ox(x=6) and will be operated at or near room temperature. Two different thin film, thermal detector structures will be tried: semiconductor bolometers and pyroelectric capacitors. The bolometers will be made of semiconducting YBa2Cu3Ox on SiO2 or Si3N4 and exhibit a high rate of resistance change with temperature dR/dT. The significance of the proposed research lies in the fact that proposed detectors operators at room temperature without refrigeration. They are relatively easy and inexpensive to fabricate and compatible with silicon technology since they can be deposited at ambient temperature by rf sputtering. It is projected that the proposed research will lead to a better understanding of the electronic properties of nonsuperconducting YBa2Cu3Ox and their dependence upon oxygen stoichiometry. This proposal will be also be the first time where Yba2Cu3Ox IR detectors will be fabricated on air-gap bridge structures. Since the proposed devices do not require cooling for operation and can be fabricated using inexpensive techniques and materials, it will be less costly for defense applications and more suitable for civilian needs such as night-time navigation, security or biomedical thermal imaging. Their cryogenic counterparts, superconducting bolometers and HgCdTe photovoltaic or photoconductive devices are expensive to fabricate costly to operate. The proposed research will be in collaboration with Texas Instruments Inc. and University of North Texas. ***

9421969 Celik-Bulter 主要研究人员将探索用于非冷却红外探测应用的 YBa2Cu3Ox 薄膜的非超导相。 长期目标是在微机械硅结构上构建热成像阵列，具有高热隔离性和高响应度。 这将使集成电路的制造成为可能，其中辐射检测和信号处理在同一芯片上执行。 这些红外探测器将利用 YBa2Cu3Ox(x=6) 的缺氧相，并在室温或接近室温下运行。 将尝试两种不同的薄膜热探测器结构：半导体辐射热测量计和热释电电容器。 辐射热测量计将由 SiO2 或 Si3N4 上的半导体 YBa2Cu3Ox 制成，并表现出较高的电阻随温度变化率 dR/dT。 所提出的研究的意义在于所提出的探测器在室温下操作而无需制冷。 它们的制造相对容易且便宜，并且与硅技术兼容，因为它们可以在环境温度下通过射频溅射进行沉积。 预计所提出的研究将有助于更好地理解非超导 YBa2Cu3Ox 的电子特性及其对氧化学计量的依赖性。 该提案也将是首次在气隙桥结构上制造 Yba2Cu3Ox 红外探测器。 由于所提出的设备不需要冷却来运行，并且可以使用廉价的技术和材料来制造，因此对于国防应用来说成本较低，并且更适合民用需求，例如夜间导航、安全或生物医学热成像。 它们的低温对应物、超导测辐射热计和 HgCdTe 光伏或光导器件的制造成本和运行成本都很高。 拟议的研究将与德州仪器公司和北德克萨斯大学合作。 ***