Acquisition of Laser Ablation Deposition System

收购激光烧蚀沉积系统

• 批准号: 9601791
• 负责人: Zeynep Celik-Butler
• 金额: $ 17.5万
• 依托单位: Southern Methodist University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9601791&HistoricalAwards=false
• 关键词: Acquisition; Laser; Ablation; Deposition; System

9601791 Celik-Butler The acquisition of a Laser Ablation Deposition system (LAD) is enabled. LAD has been demonstrated as a superior deposition technique for the fabrication of compound oxide thin films as compared to other available techniques such as sputtering and e-beam evaporation. The LAD will be placed in the Solid State Technology Laboratory which has the capability for semiconductor device fabrication including Si-MOS, Si micromachining, and semiconductor lasers. The proposed LAD system will become the only LAD system in the North Texas region. The LAD system will be primarily used to deposit semiconducting YBaCuO thin films for application as uncooled microbolometers and semi-insulating YBaCuO thin films for application as uncooled pyroelectric detectors. This work is supported by the NSF, ARO and Texas Instruments. The cost of the proposed LAD system project is $275,000 of which SMU will provide a 45% cost share. YBaCuO is well known for its superconducting properties. However more recently, the nonsuperconducting phases of YBaCuO are demonstrating themselves useful in a number of applications including uncooled infrared (IR) detection, the second harmonic generation of light, and photoconductive switching. The materials are attractive since they are stable in composition and properties and easy to deposit. One of the phases of YBaCuO is YBa2Cu3O6+x. As x is increased from 0 to 1, YBa2Cu3O6+x evolves from an insulator with a well-defined energy gap to a Fermi glass, and then through a metal-insulator transition to a metal. Simultaneously, the crystal lattice changes from tetragonal to orthorhombic. The oxygen content thereby determines the electrical and optical properties of a material. YBa2Cu3O6+x is a ferroelectric material with pyroelectric properties. In the semi-insulating phase, it has a low leakage current and is therefore suitable for application as an uncooled pyroelectric detector. In the semi-conducting phase, YBa2Cu3O6+x has a narrow band-gap, inheren tly low 1/f noise and a large change in resistivity with temperature (TCR=3.9%) making it suitable as an uncooled bolometer. Our preliminary investigations have shown that semiconducting YBa2Cu3O6+x uncooled bolometers offer higher responsivities (Rv = 6x104V/W) and detectivities than cooled superconducting YBa2Cu3O6+x bolometers. In addition, their performance is superior to other uncooled IR detectors including VO2 bolometers and PbTiO3 pyroelectric detectors. To date, the semiconducting YBa2Cu3O6+x IR sensitive material has been fabricated by simple rf sputtering at room temperature onto Si, SiO2 and Si3N4 substrates, showing material compatibility with a CMOS process towards the fabrication of micromachined, uncooled microbolometer arrays with focal plane signal processing resultant in a low cost IR imaging circuit. We believe that control over the stoichiometry of the YBa2Cu3O6+x thin films would be significantly improved by the use of LAD for the thin film fabrication. This would allow for greater reproducibility and allow for the stoichiomery to be optimized to produce even better performance. Therefore the acquisition of a LAD system would be a tremendous benefit to the project. Further, an LAD system would improve the capability of the laboratory allowing for future research projects in the fabrication of compound oxide thin films with linear and nonlinear electro-optic properties. Work in this area would compliment the semiconductor laser group and allow for the fabrication of integrated optic devices. In addition, projects would be initiated on the application of ferroelectric compound oxides to Si devices such as the gate insulator in DRAMs. Since, the proposed system will be the only LAD system in North Texas, it is anticipated other researchers will be attracted to the facility. Faculty at SMU have a very cooperative relationship with faculty at the University of Texas at Arlington, the University of Texas at Dallas, and the University of North Texas. In addition, a large number of companies are involved in the fabrication of Si and GaAs devices in the Dallas-Ft. Worth metroplex which may need access to a LAD system to test some concepts. The probability is high that external users will find the facility attractive one established. ***

9601791 Celik-Butler能够获得激光烧蚀沉积系统(LAD)。与溅射和电子束蒸发等其他现有技术相比，LAD已被证明是制备复合氧化物薄膜的一种优越的沉积技术。LAD将被放置在固态技术实验室，该实验室具有制造半导体器件的能力，包括硅MOS、硅微机械加工和半导体激光器。拟议的法援署系统将成为北得克萨斯州地区唯一的法援署系统。LAD系统将主要用于沉积用于非制冷微测辐射热计的半导体YBaCuO薄膜和用于非制冷热释电探测器的半绝缘YBaCuO薄膜。这项工作得到了NSF、ARO和德州仪器的支持。拟议的法援署系统计划的费用为275,000元，而法援署将承担其中45%的费用。YBaCuO以其超导性能而闻名。然而，最近，YBaCuO的非超导相在非制冷红外(IR)探测、二次谐波光产生和光导开关等方面显示出很好的应用前景。该材料成分稳定，性能稳定，易于沉积，具有很大的吸引力。YBaCuO的相之一是YBa2Cu3O6+x。随着x从0增加到1，YBa2Cu3O6+x从具有明确能隙的绝缘体演化为费米玻璃，然后通过金属-绝缘体转变为金属。同时，晶格由四方晶格转变为斜方晶格。因此，氧含量决定了材料的电学和光学性质。YBa2Cu3O6+x是一种具有热释电性质的铁电材料。在半绝缘阶段，它具有低的泄漏电流，因此适合作为非制冷热释电探测器应用。在半导体相，YBa2Cu3O6+x禁带宽度较窄，1/f噪声低，电阻率随温度变化较大(TCR=3.9%)，适合作为非制冷测辐射热计。我们的初步研究表明，半导体YBa2Cu3O6+x非制冷测辐射热计比冷却超导YBa2Cu3O6+x测辐射热计具有更高的响应度(RV=6×104V/W)和探测能力。此外，它们的性能优于其他非制冷红外探测器，包括VO2测辐射热计和PbTiO3热释电探测器。到目前为止，半导体YBa2Cu3O6+x红外敏感材料已经在室温下通过简单的射频溅射在硅、二氧化硅和氮化硅衬底上制备出来，显示出与用于制造微机械、非制冷微测辐射热计阵列的CMOS工艺的材料兼容性，该微机械加工的焦平面信号处理得到了低成本的红外成像电路。我们相信，使用激光二极管来制备YBa2Cu3O6+x薄膜将显著改善对薄膜化学计量比的控制。这将允许更大的重复性，并允许对化学物质进行优化，以产生更好的性能。因此，购置法援署系统对该项目将是一个巨大的好处。此外，LAD系统将提高实验室的能力，从而允许未来在制备具有线性和非线性电光特性的复合氧化物薄膜方面的研究项目。这方面的工作将对半导体激光器组起到补充作用，并允许制造集成光学设备。此外，还将启动将铁电复合氧化物应用于硅器件的项目，例如DRAM中的栅绝缘体。由于拟议的系统将是北得克萨斯州唯一的LAD系统，预计该设施将吸引其他研究人员。SMU的教职员工与德克萨斯大学阿灵顿分校、德克萨斯大学达拉斯分校和北得克萨斯大学的教职员工有着非常密切的合作关系。此外，大量公司参与了达拉斯要塞的硅和砷化镓器件的制造。Worth Metroplex可能需要访问LAD系统来测试一些概念。外部用户发现已建立的设施具有吸引力的可能性很高。***