Electronic Sensitive Skin with Integrated Tactile, Infrared and Flow Sensors on Flexible Substrates

柔性基板上集成触觉、红外和流量传感器的电子敏感皮肤

• 批准号: 0401148
• 负责人: Zeynep Celik-Butler
• 金额: $ 21.14万
• 依托单位: University of Texas at Arlington
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2008-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0401148&HistoricalAwards=false
• 关键词: Electronic; Sensitive; Skin; Integrated; Tactile

ABSTRACTSensitive skin is a large area, flexible array of sensors with data processing capabilities. The microsensors are integrated to give the capability of sensing several stimuli, mimicking a real skin, including but not limited to temperature, touch, and flow. The objectives of this research are to integrate thermometers, micromachined infrared detectors, and pressure sensors onto flexible substrates such as commercially available Kapton as well as custom made inorganic polymers (poly (methylphenylphosphazene), [Me(Ph)P=N]n, PMPP) developed under the current NSF grant. In addition, a feasibility study will be done to incorporate flow sensors. The use of multi-sensory arrays is particularly attractive to robotics applications where operators would like to have a "human-like" sense of the environment. Micromachined, distributed multi-sensory arrays will be fabricated on the flexible polymer substrates. The mechanical, electrical and optical sensory performance of the micromachined sensors will be measured. To maintain low cost, it will be important to utilize standard Si fabrication equipment. This investigation will employ standard micromachining techniques with polymer-coated wafers to allow standard fabrication equipment to be employed. Upon completion of the fabrication, the polymer will be released from the wafers to provide a flexible substrate. The outcome of this research is NOT a product that would replace human skin, but a product that would emulate the functions of a human skin on inanimate objects such as robots, aircraft, and other macro- and micro-scale machines.Intellectual Merit: This is the first known effort to build micromachined, integrated, multi-sensory arrays on flexible substrates. Challenges include thermal budget restrictions of the underlying polymer substrates, mechanical integrity of the sensors on the flexible substrates, surface roughness of these substrates, signal routing, adhesion of metals to polyimide substrates, cross-talk between sensors and power supply requirements. A primary consideration in the development of flexible electronic devices is adhesion of circuit components to the flexible substrate. This is dependent upon having a substrate surface that is chemically modifiable. The science and technology developed through this investigation will enable a broad class of distributed micromachined sensors that may be produced on flexible substrates. The multisensory arrays developed in this investigation represent a step towards the development of a sensitive skin that will also include signal processing electronics. The IR microsensors will employ microbolometers that are capable of detecting broadband infrared radiation extending into the far-infrared. Piezoresistive tactile sensors with sensitivity greater than the human skin will be developed. The tactile sensors will respond to the touch-pressure exerted on the substrate as well as stress developed by bending the substrate. Broader Impacts: One of the PIs will participate in the Advanced Summer Institute for Educators that provides training opportunities for high school math and science teachers. In addition, 4th grade and 9th grade students in an Elementary and High School have been targeted for in-class presentations on flexible electronics by the research group. The activities described in this proposal, especially the applications as an artificial skin, would be attractive to youth and can be used to recruit students to science and engineering.

敏感皮肤是一个大面积、灵活的传感器阵列，具有数据处理能力。微传感器被集成以提供感测若干刺激的能力，模仿真实的皮肤，包括但不限于温度、触摸和流动。这项研究的目标是将温度计，微机械红外探测器和压力传感器集成到柔性基板上，例如市售的Kapton以及根据当前NSF资助开发的定制无机聚合物（聚（甲基苯基磷腈），[Me（Ph）P=N]n，PMPP）。此外，将进行可行性研究，以纳入流量传感器。多传感器阵列的使用对于机器人应用特别有吸引力，在机器人应用中，操作员希望对环境有“类似人类”的感觉。微机械，分布式多传感器阵列将在柔性聚合物基板上制造。将测量微机械传感器的机械、电气和光学传感性能。为了保持低成本，使用标准的Si制造设备将是重要的。这项调查将采用标准的微加工技术与聚合物涂层芯片，使标准的制造设备被采用。在完成制造时，聚合物将从晶片释放以提供柔性基板。这项研究的成果并不是一种可以替代人类皮肤的产品，而是一种可以在机器人、飞机和其他宏观和微观尺度的机器等无生命物体上模拟人类皮肤功能的产品。智力优势：这是第一次在柔性基底上构建微机械、集成、多传感器阵列的努力。挑战包括底层聚合物基板的热预算限制、柔性基板上的传感器的机械完整性、这些基板的表面粗糙度、信号路由、金属与聚酰亚胺基板的粘附、传感器之间的串扰和电源要求。在柔性电子器件的开发中的主要考虑是电路部件与柔性基板的粘附。这取决于具有可化学改性的基底表面。通过这项研究开发的科学和技术将使广泛的分布式微机械传感器，可以在柔性基板上生产。本研究中开发的多传感器阵列代表了开发敏感皮肤的一步，其中还包括信号处理电子器件。红外微型传感器将采用微测辐射热计，能够探测延伸到远红外的宽带红外辐射。将开发灵敏度大于人类皮肤的压阻式触觉传感器。触觉传感器将响应于施加在基板上的触摸压力以及通过弯曲基板而产生的应力。更广泛的影响：其中一名PI将参加高级暑期教育学院，该学院为高中数学和科学教师提供培训机会。 此外，四年级和九年级的学生在小学和高中已针对课堂上演示的柔性电子由研究小组。本提案中所述的活动，特别是作为人造皮肤的应用，将对青年具有吸引力，可用于招收理工科学生。