MRI-R2: Acquisition of Precision Wafer Aligner / Bonder for 3-D Integrated Nano-Opto-Electromechanical Systems (NOEMS).

MRI-R2：采购用于 3D 集成纳米光机电系统 (NOEMS) 的精密晶圆对准器/接合器。

• 批准号: 0959935
• 负责人: Zeynep Celik-Butler
• 金额: $ 53.5万
• 依托单位: University of Texas at Arlington
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-05-01 至 2012-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0959935&HistoricalAwards=false
• 关键词: MRI; R2; Acquisition; Precision; Wafer

"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)"The objective of this research is integration of optical, electrical and mechanical systems at nano- and micro-meter scale, thus enabling novel biomedical, energy harvesting and structural health monitoring devices and systems, otherwise not possible. The approach is to use a wafer aligner and bonder system for precision alignment and bonding of a diverse set of substrates including semiconductor wafers, glass substrates, metals and polymers.The intellectual merit lies in combining top-down and bottom-up fabrication techniques to pioneer new interfaces between semiconductor-based devices and biomolecules that can be tailored for specific applications, both as sensors and actuators / controllers of biological phenomena. The interrogation of bio-molecules and understanding of real cellular interactions require 3-D biocompatible structures, chambers and interfaces. Ranging in length scales from a few nanometers to many microns, inter and intra-cellular mechano-transduction signals play important roles in many aspects of cellular functions.The proposed Precision Wafer Aligner / Bonder will be part of NanoFab at UT Arlington, which is an interdisciplinary resource open to scientists within and outside of the University. The Dallas-Forth Worth metropolitan region is home to more than 400 high tech institutions. As a user facility, the NanoFab will make the wafer aligner / bonder available 24/7 to these researchers and provide them training for usage. An annual workshop as well as an online discussion forum dedicated to 3-D integration will be established.

“这项研究的目标是在纳米和微米尺度上集成光学、电气和机械系统，从而实现新的生物医学、能量收集和结构健康监测设备和系统，否则是不可能的。”该方法是使用晶圆对准器和键合系统对各种基板进行精确对准和键合，包括半导体晶圆、玻璃基板、金属和聚合物。智力上的优点在于结合了自上而下和自下而上的制造技术，开创了半导体器件和生物分子之间的新接口，可以为特定应用量身定制，既可以作为传感器，也可以作为生物现象的执行器/控制器。对生物分子的研究和对真实细胞相互作用的理解需要三维生物相容性结构、腔室和界面。细胞间和细胞内的机械转导信号的长度范围从几纳米到许多微米不等，在细胞功能的许多方面起着重要作用。拟议中的精密晶圆对准器/粘合器将成为UT阿灵顿分校纳米实验室的一部分，这是一个向大学内外的科学家开放的跨学科资源。达拉斯-福斯沃斯大都市区拥有400多家高科技机构。作为用户设施，NanoFab将为这些研究人员提供全天候的晶圆对准器/粘合器，并为他们提供使用培训。将建立一个年度研讨会以及一个致力于3d集成的在线讨论论坛。