Point of Use Generation of Silane Gas

硅烷是一种有毒的自燃气体，半导体制造业大量使用（150，000磅/年）。先进技术材料公司（ATMI）是开发洗涤器、净化器和有害气体输送系统的全球领导者。在拟议的第一阶段计划中，ATMI将与威斯康星州大学合作，确定以使用点方式从无害前体生产硅烷的可行性。这些前体经过专门设计，既可以生成高纯度硅烷，又可以回收化学副产物。硅烷生成系统的可用性将代表对半导体制造设施及其所在社区的环境安全和健康的重大增强。 在第二阶段计划中，ATMI将开发大规模的前体合成程序，并将建造一个用于生长高纯硅的原型发生器。这将导致该系统在第三阶段的商业引入。

Silane is a toxic, pyrophoric gas which is used in large quantities (150,000 lbs/yr) by the semiconductor manufacturing industry. Advanced Technology Materials (ATMI) is a world leader in the development of scrubbers, purifiers, and delivery systems for hazardous gases. In the proposed Phase I program ATMI will work with the University of Wisconsin to determine the feasibility of generating silane in a point-of-use fashion from nonhazardous precursors. The precursors are specifically designed to allow both generation of high purity silane and recycling of the chemical byproducts. The availability of a silane generation system would represent a major enhancement to the environmental safety and health of semiconductor fabrication facilities and the communities in which they are located. In the Phase II program ATMI will develop large scale synthetic procedures for the precursors and will build a prototype generator which will be used to grow high purity silicon. This will lead to commercial introduction of the system in Phase III.