Ion Implanted Thin Film Zinc Gallate Phosphors for Field Emission Displays

用于场致发射显示器的离子注入薄膜没食子酸锌荧光粉

• 批准号: 9461966
• 负责人: Themis Parados
• 金额: $ 6.5万
• 依托单位: Spire Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-01-01 至 1995-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9461966&HistoricalAwards=false
• 关键词: Ion; Implanted; Thin; Film; Zinc

This Small Business Innovation Research Phase I Project Spire proposes to develop zinc gallate (ZnGa2O4) as a thin-film host phosphor, and produce full color (red, green, blue) faceplates by selective ion implantation of recognized luminescent centers for this material, viz., Cr, Mn, Ga. Field emission displays (FEDs) based on cathodoluminescent (CL) phosphors are rapidly becoming the favorite embodiment for flat panel displays in America, and many efforts are underway to bring FEDs into the marketplace. However, due to their granular nature and limited operating lifetime, conventional sulfide-based powder phosphors compromise FED performance. Replacing powdered phosphors with sulfur-free, thin film oxide materials produced by physical vapor deposition can improve chromaticity, allow much finer definition, and reduce phosphor degradation while aiding in process automation to allow control of manufacturing costs. In parallel ARPA sponsored programs, Spire has used ion implantation in phosphors to demonstrate 50 fL (60 Hz) yellow with ZnS:Mn and 1 fL (60 Hz) blue with CaGa2S4:Ce for thin film electroluminescence; and 15 fL (1 mA/cm2) green with Zn2SiO4:Mn for thin film cathodoluminescence, all state-of-the-art brightness levels. The proposed program will demonstrate all three colors in adjacent lines on a single FED faceplate. Phase II will optimize phosphor chemistry and improve external efficiency by studying various texturing approaches to minimize waveguiding.

这个小型企业创新研究第一阶段项目Spire计划开发没食子酸锌(ZnGa2O4)作为薄膜主体荧光粉，并通过对这种材料公认的发光中心(即铬、锰、镓)进行选择性离子注入来生产全色(红、绿、蓝)面板。基于阴极发光(CL)荧光粉的场发射显示器(FED)正迅速成为美国平板显示器的最受欢迎的体现，许多努力正在将FED推向市场。然而，由于其颗粒性和有限的使用寿命，传统的硫化物粉末荧光粉影响了FED的性能。用物理气相沉积生产的无硫薄膜氧化物材料取代粉状荧光粉可以提高色度，实现更精细的清晰度，并减少磷光粉的降解，同时有助于实现工艺自动化，从而控制制造成本。在ARPA赞助的平行项目中，Spire使用离子注入到荧光粉中，展示了50fl(60 Hz)黄色和1 fl(60 Hz)蓝色的CaGa2S4：Ce薄膜电致发光，以及15fl(1 mA/cm2)的Zn2SiO4：Mn薄膜阴极发光，所有这些都是最先进的亮度级别。拟议的程序将在单个FED面板上以相邻线条展示所有三种颜色。第二阶段将通过研究各种织构方法来优化荧光粉化学并提高外部效率，以最大限度地减少波导。