Technology for Ultra-High Precision Mechanical Metrology

超高精度机械计量技术

• 批准号: 9500390
• 负责人: Steven Patterson
• 金额: $ 27.79万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-05-01 至 1999-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9500390&HistoricalAwards=false
• 关键词: Technology; Ultra; Precision; Mechanical; Metrology

9500390 Patterson This award supports a new concept in precision metrology, the Extreme Ultraviolet Optics Measuring Machine (EUVOMM). The goals for this system when used to measure optical surfaces are a diameter range of 250 mm with a lateral accuracy of 3.3 nm rms, and a depth range of 7.5 mm with a depth accuracy of 0.33 nm rms. This can be achieved using design and integration of several precision engineering and optical technologies: precise motion control, reduction of systematic errors in heterodyne interferometry, and atomic force microscopy as the sensing probe. The tasks supported by this award are: system optimization, study of the scaling of elastic mechanisms, and implementation of the analysis results in an experimental high-precision slide drive system. This work will complement, and is in part be supported by, work at Lawrence Livermore Lab's Manufacturing Technologies Program. This research will provide the technical basis for fabrication and testing of diffraction limited optical systems operating in the ultraviolet or soft x-ray region. This will lead to a new generation of instruments for research and fabrication in the semiconductor industry. ***

9500390帕特森该奖项支持精密计量领域的新概念--极端紫外光光学测量机(EUVOMM)。该系统用于测量光学表面时，目标直径范围为250 mm，横向精度为3.3 nm RMS，深度范围为7.5 mm，深度精度为0.33 nm RMS。这可以使用几种精密工程和光学技术的设计和集成来实现：精确的运动控制，减少外差干涉测量中的系统误差，以及原子力显微镜作为传感探头。该奖项支持的任务包括：系统优化，弹性机构比例研究，以及在试验性高精度滑块驱动系统中实施分析结果。这项工作将补充劳伦斯·利弗莫尔实验室制造技术项目的工作，并得到部分支持。这项研究将为工作在紫外区或软X射线区的衍射受限光学系统的制作和测试提供技术基础。这将导致半导体行业研究和制造的新一代仪器。***