Integrated Structure/Actuator/Control Design of Trajectory Pattern Tuned Computer Controlled Ultra-High Speed and Accuracy Machine (GOALI)

轨迹模式调谐计算机控制超高速高精度机器（GOALI）的结构/执行器/控制一体化设计

• 批准号: 9700456
• 负责人: Qiaode Jeffrey Ge
• 金额: $ 22.02万
• 依托单位: SUNY at Stony Brook
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-06-01 至 2001-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9700456&HistoricalAwards=false
• 关键词: Integrated; Structure; Actuator; Control; Design

The GOALI industry-university collaborative research project deals with simultaneous design of trajectory pattern tuned computer controlled machinery for ultra-high speed and accuracy applications such as lithography, bonding, and inspection in the electronics industry as well as for the production of high quality optical components instruments. The mail goal of the project is to develop a trajectory- pattern based, systematic methodology for simultaneous design, optimization, and fine-tuning of all subsystems (structure, actuator, control) of a computer controlled machinery to achieve ultra-high performance for the classes of specified tanks. The project also involves the detailed design, construction, and system integration of a testbed for high-performance machinery. The testbed will be used to evaluate the effectiveness of the design methodology, the performance of the constructed systems, its various components and motion synthesis and control algorithms. By designing and tuning system parameters for the actual trajectory patterns that a high-performance machine is required to perform, one can fully take advantage of the interaction among the machine structure, the actuators, and controllers to achieve ultra-high performance with significant; cost savings. The multidisciplinary project is to be carried out in a period of three years in collaboration with three companies (Anorad Corporation, Morgan Matroc Electro Ceramics Division, and OmniTek Research Development, Inc.) with expertise ranging from machine design, dynamics, control, design of passive and active vibration damping elements, system integration, as well as manufacturing of piezoceramic-based active components. The project demonstrates how both universities and manufacturing and engineering industry may benefit from cooperative research in the development, application, and integration of available and emerging technologies in the field of optimal design and operation of ultra-high performance production machinery.

GOALI产学合作研究项目涉及轨迹模式调谐计算机控制机械的同步设计，用于超高速和高精度应用，如电子工业中的光刻，键合和检测以及高质量光学元件仪器的生产。 该项目的主要目标是开发一种基于轨迹模式的系统方法，用于计算机控制机械的所有子系统（结构，致动器，控制）的同步设计，优化和微调，以实现指定坦克级别的超高性能。该项目还涉及高性能机械试验台的详细设计、建造和系统集成。该试验台将用于评估设计方法的有效性，所构建系统的性能，其各种组件以及运动合成和控制算法。通过针对高性能机器需要执行的实际轨迹模式设计和调整系统参数，可以充分利用机器结构、致动器和控制器之间的相互作用来实现超高性能，同时显著节省成本。该多学科项目将在三年内与三家公司（Anorad Corporation、Morgan Matroc Electro Ceramics Division和OmniTek Research Development，Inc.）合作实施。拥有机械设计、动力学、控制、被动和主动减振元件设计、系统集成以及基于压电陶瓷的主动元件制造等方面的专业知识。该项目展示了大学、制造业和工程业如何从合作研究中受益，这些研究涉及超高性能生产机械的优化设计和操作领域的现有和新兴技术的开发、应用和整合。