In-Situ X-ray Structural Study of Electrode less- Metallization Using a Chemical Deposition Process

使用化学沉积工艺进行无电极金属化的原位 X 射线结构研究

• 批准号: 9710789
• 负责人: Luz Martinez-Miranda
• 金额: $ 6万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-09-01 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9710789&HistoricalAwards=false
• 关键词: Situ; ray; Structural; Study; Electrode

9710789 Martinez-Miranda Nanometer size particles or films of materials have structural, electrical and mechanical properties that differ from those of the bulk material, due to confinement effects and the presence of a large number of interfaces. These materials have potential new applications in devices. Their use as device elements depends on the careful control of the materials' properties, achieved through the careful control of the processing methods used to develop these materials. Many methods are used to prepare nanoscale materials. This proposal concentrates on the analysis of materials grown by solution chemistry, specifically using a non-aqueous, alcohol-based route known as the polyol method. Scientists at the Naval Research Laboratory have used this method in the metallization of electronic ceramic substrates. Little information exists about the process of metal precipitation on the substrate, and of the eventual process of nucleation and film growth. Similarly, the structural evolution of the film during the deposition process is not known. This proposal describes a collaborative effort to study the in-situ structural evolution of metal deposition on AIN substrates between the University of Maryland and the Naval Research Laboratory. Film structure can be probed using diffraction methods. The project consists of two activities: 1. the development of a deposition cell suitable for in-situ diffraction studies; 2. An in-situ combined grazing incidence asymmetric Bragg (GIAB) diffraction study and small angle x-ray scattering (SAXS) study of film evolution during deposition. This study will examine the following issues: 1. the possible existence of predeposition nanometer size agglomerates; 2. the formation of (reaction) layers during the first stages of deposition; 3. metal deposit evolution. These two activities combine expertise available at the University of Maryland (characterization) and at the Naval Research Laboratory. The activities will expand the charac terization capabilities available at the University of Maryland as well as provide an increase understanding of how processing parameters affect film formation. This project will impact other potential collaborations involving the solution-based deposition of magnetic multilayers and ceramic materials' films and particles. ***

9710789 Martinez-Miranda由于约束效应和大量界面的存在，纳米尺寸的颗粒或材料薄膜具有不同于块状材料的结构、电学和机械性能。这些材料在器件中有潜在的新应用。它们作为器件元件的使用取决于对材料特性的仔细控制，通过对用于开发这些材料的加工方法的仔细控制来实现。制备纳米材料的方法有很多种。这个建议集中于分析通过溶液化学生长的材料，特别是使用一种非水的、醇基的方法，即多元醇方法。海军研究实验室的科学家们已经将这种方法用于电子陶瓷基板的金属化。关于金属在基体上析出的过程，以及最终的成核和薄膜生长过程的信息很少。同样，薄膜在沉积过程中的结构演变也是未知的。该提案描述了马里兰大学和海军研究实验室之间合作研究AIN基板上金属沉积的原位结构演变的努力。用衍射法可以探测薄膜结构。该项目包括两个活动：1。适合原位衍射研究的沉积池的研制2. 原位联合掠入射不对称Bragg衍射（GIAB）和小角x射线散射（SAXS）研究沉积过程中膜的演变。本研究将探讨以下问题：1。预沉积纳米级团聚体存在的可能性；2. 沉积初期（反应）层的形成；3. 金属矿床演化。这两项活动结合了马里兰大学（表征）和海军研究实验室的专业知识。这些活动将扩大马里兰大学现有的表征能力，并增加对处理参数如何影响薄膜形成的理解。该项目将影响其他潜在的合作，包括磁性多层膜和陶瓷材料的薄膜和颗粒的溶液沉积。＊＊＊