In-Situ X-ray Structural Study of Electrode less- Metallization Using a Chemical Deposition Process

9710789 Martinez-Miranda纳米尺寸的材料颗粒或膜由于限制效应和大量界面的存在而具有不同于块状材料的结构、电和机械性能。 这些材料在器件中具有潜在的新应用。 它们作为器件元件的使用取决于对材料特性的仔细控制，通过仔细控制用于开发这些材料的加工方法来实现。 许多方法被用来制备纳米材料。 该提案集中于通过溶液化学生长的材料的分析，特别是使用称为多元醇方法的非水性醇基路线。 海军研究实验室的科学家已经将这种方法用于电子陶瓷基板的金属化。 关于金属沉淀在衬底上的过程以及成核和膜生长的最终过程的信息很少。 类似地，膜在沉积过程期间的结构演变是未知的。 该提案描述了马里兰州大学和海军研究实验室之间的合作努力，研究在AlN衬底上的金属沉积的原位结构演变。 薄膜结构可以用衍射方法探测。 该项目包括两项活动：1。适合于原位衍射研究的沉积池的开发; 2.一个在原位结合掠入射非对称布拉格（GIAB）衍射研究和小角X射线散射（SAXS）的薄膜沉积过程中的演变研究。 本研究将探讨以下问题：1。可能存在预沉积纳米尺寸团聚体; 2.在沉积的第一阶段期间形成（反应）层; 3.金属存款演化 这两项活动结合了马里兰州大学（表征）和海军研究实验室的联合收割机专业知识。 这些活动将扩大马里兰州大学现有的表征能力，以及提供一个如何处理参数影响薄膜形成的理解增加。 该项目将影响其他潜在的合作，包括基于溶液的磁性多层膜和陶瓷材料薄膜和颗粒的沉积。 ***

9710789 Martinez-Miranda Nanometer size particles or films of materials have structural, electrical and mechanical properties that differ from those of the bulk material, due to confinement effects and the presence of a large number of interfaces. These materials have potential new applications in devices. Their use as device elements depends on the careful control of the materials' properties, achieved through the careful control of the processing methods used to develop these materials. Many methods are used to prepare nanoscale materials. This proposal concentrates on the analysis of materials grown by solution chemistry, specifically using a non-aqueous, alcohol-based route known as the polyol method. Scientists at the Naval Research Laboratory have used this method in the metallization of electronic ceramic substrates. Little information exists about the process of metal precipitation on the substrate, and of the eventual process of nucleation and film growth. Similarly, the structural evolution of the film during the deposition process is not known. This proposal describes a collaborative effort to study the in-situ structural evolution of metal deposition on AIN substrates between the University of Maryland and the Naval Research Laboratory. Film structure can be probed using diffraction methods. The project consists of two activities: 1. the development of a deposition cell suitable for in-situ diffraction studies; 2. An in-situ combined grazing incidence asymmetric Bragg (GIAB) diffraction study and small angle x-ray scattering (SAXS) study of film evolution during deposition. This study will examine the following issues: 1. the possible existence of predeposition nanometer size agglomerates; 2. the formation of (reaction) layers during the first stages of deposition; 3. metal deposit evolution. These two activities combine expertise available at the University of Maryland (characterization) and at the Naval Research Laboratory. The activities will expand the charac terization capabilities available at the University of Maryland as well as provide an increase understanding of how processing parameters affect film formation. This project will impact other potential collaborations involving the solution-based deposition of magnetic multilayers and ceramic materials' films and particles. ***