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Acquisition of a Scanning Focused Ion Beam (FIB) System

Acquisition of a Scanning Focused Ion Beam (FIB) System
采购扫描聚焦离子束 (FIB) 系统
批准号：
9724277
负责人：
Vinayak Dravid
金额：
$41.41万
依托单位：
Northwestern University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
1997
资助国家：
美国
项目状态：
已结题
起止时间：
1997-09-01 至 2000-08-31
来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=9724277&HistoricalAwards=false
关键词：
AcquisitionScanningFocusedIonBeam

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中文摘要
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英文摘要
9724277 Dravid A scanning focused ion beam (FIB) system for fabrication, lithography and site-specific micromachining of a diverse set of materials systems will be acquired by Northwestern University. Material systems to be studied using the FIB capabilities include structural ceramics, metal alloys, electronic, polymeric and biological materials. %%% The instrument will assist a large number of research programs at Northwestern and local institutions. It will also impact the undergraduate curriculum at Northwestern as well as the University's education outreach activities. ***
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