Vibration-Control of Nonlinear Piezo-Dynamics During Precision Position-Tracking Maneuvers

9813080 Devasia该研究项目解决了限制基于压电的超高分辨率定位平台（如尺蠖和弯曲框架）带宽的振动问题-在高速定位机动过程中由诱导结构振动引起的瞬态误差问题。 我们的目标是提高速度，从而通过发展高速定位平台所需的理论和实验专业知识来增加吞吐量。 所提出的范例使用非线性反演的压电定位阶段的动态寻找输入，补偿结构振动。 这种方法将导致精确跟踪所需的机动。 所采用的关键技术包括：（i）通过有限元方法建立压电定位平台的非线性动力学模型;基于平衡实现的模型降阶;引入非线性迟滞效应;在线参数估计;（ii）开发压电动力学的非线性逆;以及（iii）使用尺蠖压电台和弯曲压电台的实验评估。 基于压电的高分辨率定位器是光电子、半导体和智能结构等先进技术领域应用的关键工具。 通过在基于压电的定位系统中实现高速，该研究旨在增加采用这些定位器的系统的吞吐量。 这项工作也影响了其他高科技行业，从运输到医疗技术，通过基于微电子技术不断提高的成本效益取得快速进展。 ***

9813080 Devasia This research project addresses the vibrational problem that limits the band-width of piezo-based ultra-high resolution positioning stages like Inchworms and Flexural-frames - the problem of transient errors which are caused by induced structural-vibrations during high-speed positioning maneuvers. The goal is to improve speed and thereby to increase throughput by developing the theoretical and experimental expertise needed for high-speed positioning stages. The proposed paradigm uses nonlinear-inversion of piezo-positioning-stage dynamics for finding inputs that compensate for structural vibrations. This approach will lead to precision tracking of the desired maneuvers. The key techniques to be used include: (i) modeling of the nonlinear dynamics of the piezo-based positioning-stages via the Finite Element Methods; Balanced-Realization-based model order reduction; incorporating nonlinear hysteresis effects; and online parameter estimation; (ii) development of nonlinear inverse of the piezo-dynamics; and (iii) an experimental evaluation using an Inchworm piezo-stage and a Flexural piezo-stage. Piezo-based high-resolution positioners are key enabling tools with applications in advanced-technology areas like opto-electronics, semiconductors, and smart-structures. By achieving high speeds in piezo-based positioning-systems, the research aims to increase throughputs of systems which employ these positioners. This work also impacts other high-tech industries from transportation to medical technology by making rapid progress based on the ever-increasing cost effectiveness of micro-electronics technologies. ***