Image-Based Control of Movement-Induced Vibration During High-Speed Operation of Scanning Probe Microscopes

摘要本研究将解决限制扫描探针显微镜（SPM）运行速度的运动诱导振动的关键问题。值得注意的是，SPM是实验研究和操纵纳米尺度（和亚纳米尺度）现象的关键使能工具。然而，在SPM的高速操作期间，运动引起的振动导致样品和/或探针的损坏以及被研究的表面性质的修改。因此，当前SPM系统以低速操作;例如，高分辨率SPM系统以在系统中激发显著振动的最低谐振频率的约1/100操作。因此，运动引起的振动限制了当前SPM系统的操作速度。这项工作提出了补偿的运动引起的振动，从而使亚纳米分辨率的SPM的高速操作，而没有不利的影响，如样品和探针损坏。所提出的方法的新奇在于，它将利用现有的SPM的成像能力，以提高操作速度。本研究包含以下三项工作：（1）使用SPM图像测量动力学效应;（2）补偿SPM动力学;（3）使用扫描隧道显微镜（STM）评估操作速度的增加。所提出的方法将被用来评估STM可以成像标准样品，如高取向热解石墨（HOPG）中的碳原子的最大速度。SPM是一个关键的使能工具，拟议的改进将对纳米科学和纳米技术的研究和开发产生广泛的影响。拟议的工作还将建立在新兴的纳米技术产业保持竞争力所需的研究和人力资源基础设施。

ABSTRACTThis research will address the critical problem of movement-induced vibration that limits the operating speed of Scanning Probe Microscopes (SPMs). It is noted that SPMs are key enabling tools in the experimental investigation and manipulation of nano scale (and sub-nano scale) phenomena. However, during high-speed operation of SPMs, movement-induced vibration leads to damage of the sample and/or probe as well as modification of the surface properties being investigated. Therefore, current SPM systems are operated at low speeds; for example, high-resolution SPM systems operate at around 1/100th of the lowest resonant frequency that excites significant vibrations in the system. Thus, movement-induced vibration limits the operating speed of current SPM systems. This work proposes to compensate-for the movement-induced vibration and, thereby, to enable high-speed operation of SPMs with sub-nanometer resolution, and without adverse affects such as sample and probe damage. The novelty of the proposed approach is that it will exploit the extant imaging capability of the SPM to increase the operating speed. The proposed research consists of following three tasks: (1) measure effects of dynamics using SPM images; (2) compensate-for the SPM dynamics; and (3) evaluate increase in operating speed using Scanning Tunneling Microscope (STM). The proposed approach will be used to evaluate the maximum speed at which a STM can image standard samples such as carbon atoms in highly oriented pyrolytic graphite (HOPG). The proposed improvements of SPM, a key-enabling tool, will have a broad impact on research and development in nanosciences and nanotechnologies. The proposed work will also build the research and human resource infrastructure needed to remain competitive in emerging nanotechnology industries.