Image-Based Control of Movement-Induced Vibration During High-Speed Operation of Scanning Probe Microscopes

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ABSTRACTThis research will address the critical problem of movement-induced vibration that limits the operating speed of Scanning Probe Microscopes (SPMs). It is noted that SPMs are key enabling tools in the experimental investigation and manipulation of nano scale (and sub-nano scale) phenomena. However, during high-speed operation of SPMs, movement-induced vibration leads to damage of the sample and/or probe as well as modification of the surface properties being investigated. Therefore, current SPM systems are operated at low speeds; for example, high-resolution SPM systems operate at around 1/100th of the lowest resonant frequency that excites significant vibrations in the system. Thus, movement-induced vibration limits the operating speed of current SPM systems. This work proposes to compensate-for the movement-induced vibration and, thereby, to enable high-speed operation of SPMs with sub-nanometer resolution, and without adverse affects such as sample and probe damage. The novelty of the proposed approach is that it will exploit the extant imaging capability of the SPM to increase the operating speed. The proposed research consists of following three tasks: (1) measure effects of dynamics using SPM images; (2) compensate-for the SPM dynamics; and (3) evaluate increase in operating speed using Scanning Tunneling Microscope (STM). The proposed approach will be used to evaluate the maximum speed at which a STM can image standard samples such as carbon atoms in highly oriented pyrolytic graphite (HOPG). The proposed improvements of SPM, a key-enabling tool, will have a broad impact on research and development in nanosciences and nanotechnologies. The proposed work will also build the research and human resource infrastructure needed to remain competitive in emerging nanotechnology industries.