Vibration Mitigation in Inchworm Nanopositioners for SPMs

SPM 的 Inchworm 纳米定位器的减振

• 批准号: 0856091
• 负责人: Santosh Devasia
• 金额: $ 15.6万
• 依托单位: University of Washington
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0856091&HistoricalAwards=false
• 关键词: Vibration; Mitigation; Inchworm; Nanopositioners; SPMs

The challenge to increase range without loss of bandwidth is a common problem in nanopositioning systems. The proposed research will address this challenge by developing inchworm positioners that achieve high-resolution positioning within each step of the inchworm while allowing large range with multiple steps. Towards this, the research will develop novel vibration mitigation tools for systems with switched dynamics. The research will: (1) develop optimal output transitions without vibrations which improve on current state transition approaches; (2) invert switched dynamic systems that arise due to the changing of boundary conditions in the inchworm; (3) account for hysteresis input nonlinearities using inversion methods; and (4) develop preview-based techniques for the integrated tracking/resetting problem. The resulting optimal approach will be used to mitigate transitional vibrations caused by each inchworm step. Thereby, the proposed work will achieve large-range, high-bandwidth positioning without loss of resolution due to movement induced vibrations during transitions. The vibration-mitigation strategy for the inchworm will be evaluated during nanoscale positioning. In summary, the proposed research will: (1) develop new tools for vibration mitigation in systems with switched dynamics; and (2) increase the bandwidth without loss of range in nanopositioning systems.The proposed research will have broad impact on nanotechnology since it improves nanopositioning in scanning probe microscopes, which are key enabling tools in nanoscience and nanotechnology. The proposed research will provide training and education in nanotechnologies through novel senior-level capstone design projects in nanopositioning and vibration mitigation. Additionally, the proposed work will offer research and educational experience to undergraduate students and promote the involvement of minority students in research. Thus, the proposed work will help to build the research and human resource infrastructure needed in emerging nanotechnologies.

在不损失带宽的情况下增加范围的挑战是纳米定位系统中的一个常见问题。 拟议的研究将通过开发尺蠖定位器来解决这一挑战，该定位器可以在尺蠖的每一步内实现高分辨率定位，同时允许多步的大范围定位。为此，该研究将为具有切换动力学的系统开发新颖的减振工具。该研究将：（1）开发无振动的最佳输出转换，从而改进当前的状态转换方法； (2)由于尺蠖体内边界条件的变化而产生的逆切换动力系统； (3) 使用反演方法考虑磁滞输入非线性； (4) 开发基于预览的技术来解决集成跟踪/重置问题。由此产生的最佳方法将用于减轻每一步尺蠖所引起的过渡振动。 因此，所提出的工作将实现大范围、高带宽定位，而不会因过渡期间运动引起的振动而损失分辨率。尺蠖的减振策略将在纳米级定位过程中进行评估。总之，拟议的研究将：（1）开发新的工具，用于在具有切换动力学的系统中减轻振动； （2）在不损失纳米定位系统范围的情况下增加带宽。这项研究将对纳米技术产生广泛的影响，因为它改进了扫描探针显微镜中的纳米定位，而扫描探针显微镜是纳米科学和纳米技术的关键支持工具。拟议的研究将通过纳米定位和减振方面的新型高级顶点设计项目提供纳米技术的培训和教育。此外，拟议的工作将为本科生提供研究和教育经验，并促进少数民族学生参与研究。因此，拟议的工作将有助于建立新兴纳米技术所需的研究和人力资源基础设施。