Gordon Research Conference on Plasma Processing Science; Tilton, New Hampshire; August 9-14, 1998

戈登等离子体处理科学研究会议；

• 批准号: 9813339
• 负责人: David Graves
• 金额: $ 0.8万
• 依托单位: Gordon Research Conferences
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-07-15 至 1998-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9813339&HistoricalAwards=false
• 关键词: Gordon; Research; Conference; Plasma; Processing

Abstract - Graves Partial support is provided for the 1998 Gordon Conference on Plasma Processing Science to be held August 9-14 in Tilton, NH. This will be used to assist younger attendees without support of their own to attend. The meeting is concerned with recent advances in the fundamental science of plasmas in the context of industrial processes. Topics to be covered include real-time control of plasma processes, particles in plasmas, environmental engineering, molecular-beam surface experiments, plasma display technology, etching of dielectrics, plasma modeling, and new applications.

摘要-Graves为将于8月9日至14日在NH的蒂尔顿举行的1998年戈登等离子处理科学会议提供部分支持。这将被用来帮助没有自己支持的年轻与会者参加。会议关注工业过程中等离子体基础科学的最新进展。将涵盖的主题包括等离子体过程的实时控制、等离子体中的粒子、环境工程、分子束表面实验、等离子体显示技术、电介质蚀刻、等离子体建模和新应用。