Gordon Research Conference on Plasma Processing Science; Tilton, New Hampshire; August 9-14, 1998

戈登等离子体处理科学研究会议；

• 批准号: 9813339
• 负责人: David Graves
• 金额: $ 0.8万
• 依托单位: Gordon Research Conferences
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-07-15 至 1998-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9813339&HistoricalAwards=false
• 关键词: Gordon; Research; Conference; Plasma; Processing

Abstract - Graves Partial support is provided for the 1998 Gordon Conference on Plasma Processing Science to be held August 9-14 in Tilton, NH. This will be used to assist younger attendees without support of their own to attend. The meeting is concerned with recent advances in the fundamental science of plasmas in the context of industrial processes. Topics to be covered include real-time control of plasma processes, particles in plasmas, environmental engineering, molecular-beam surface experiments, plasma display technology, etching of dielectrics, plasma modeling, and new applications.

摘要-坟墓 部分支持是为1998年戈登等离子体加工科学会议将于8月9日至14日在蒂尔顿，NH。 这将被用来帮助年轻的与会者没有自己的支持参加。 会议关注的是工业过程中等离子体基础科学的最新进展。 课程内容包括电浆制程的即时控制、电浆中的粒子、环境工程、分子束表面实验、电浆显示技术、电浆蚀刻、电浆模型以及新的应用。