TIE PROJECT: Industry/University Cooperative Research Center for Microcontamination Control: Detection and Control of Micro-Biocontamination in Ultra Pure Water Proces

合作项目：微污染控制产学合作研究中心：超纯水工艺中微生物污染的检测与控制

• 批准号: 9815211
• 负责人: Robert Baier
• 金额: $ 10万
• 依托单位: SUNY at Buffalo
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-08-01 至 2001-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9815211&HistoricalAwards=false
• 关键词: TIE; PROJECT; Industry; University; Cooperative

ABSTRACT EEC-9815211 BAIER This three-year project unites 4 Industry/University Cooperative Research Centers (I/UCRC) and Engineering Research Center (ERC) to study the detection and control of microbiological contamination in ultra-pure water used in the production of semi-conductor chips. The study will focus on the chemical/mechanical (CMP) processes of chip wafers since this is a high consumer of water and associated with the generation of waste water. The project aims at developing the control of micro-biocontamination in order to recycle this expensive water. The University of Arizona I/UCRC for Microcontamination Control will build and maintain a copper CMP pilot system to study off-line metrology for monitoring biofilm growth and contamination in the system. The system will also provide a test base to test the research results of the other centers. The University of Arizona Engineering Research Center for Environmentally Benign Semiconductors will study the use of advanced oxidation processes to remove any biological contaminants and reduce total organic carbons. The State University of New York at Buffalo Industry/University Cooperative Research Center for Biosurfaces will study mechanisms to measure and monitor the biocontamination. The New Jersey Institute of Technology I/UCRC for Hazardous Waste Management will study how to prevent biofueling of membranes used to degassify the ultra-pure water to be recycled. The Queen's University at Belfast (I/UCRC) QUESTOR will study the microbiology of organisms in the system and how they interact and obtain food. (This activity will be funded by the Northern Ireland Research and Technology Unit.) The I/UCRC for Microcontamination will test how the research results can be utilized for a possible recycling system in its ultra-pure water system in its clean room.

摘要 EEC-9815211 BAIER 这个为期三年的项目联合了 4 个产学研合作研究中心 (I/UCRC) 和工程研究中心 (ERC)，研究半导体芯片生产中使用的超纯水中微生物污染的检测和控制。 该研究将重点关注芯片晶圆的化学/机械（CMP）工艺，因为该工艺耗水量大，并且会产生废水。 该项目旨在开发微生物污染控制技术，以回收这种昂贵的水。 亚利桑那大学 I/UCRC 微污染控制中心将建立并维护一个铜 CMP 试点系统，以研究监测系统中生物膜生长和污染的离线计量学。 该系统还将提供一个测试基地来测试其他中心的研究成果。 亚利桑那大学环境友好半导体工程研究中心将研究使用高级氧化工艺去除任何生物污染物并减少有机碳总量。 纽约州立大学布法罗工业/大学生物表面合作研究中心将研究测量和监测生物污染的机制。 新泽西理工学院危险废物管理研究所 I/UCRC 将研究如何防止用于对回收的超纯水进行脱气的膜的生物燃料。 贝尔法斯特女王大学 (I/UCRC) QUESTOR 将研究系统中生物体的微生物学以及它们如何相互作用和获取食物。 （这项活动将由北爱尔兰研究和技术部门资助。）I/UCRC 微污染研究中心将测试如何将研究成果用于其洁净室超纯水系统中的可能的回收系统。